公开(公告)号：US11996262B2

公开(公告)日：2024-05-28

申请号：US17179165

申请日：2021-02-18

Applicant: ASML Netherlands B.V.

Inventor： Marcus Adrianus Van De Kerkhof ,  Jing Zhang ,  Martijn Petrus Christianus Van Heumen ,  Patriek Adrianus Alphonsus Maria Bruurs ,  Erheng Wang ,  Vineet Sharma ,  Makfir Sefa ,  Shao-Wei Fu ,  Simone Maria Scolari ,  Johannes Andreas Henricus Maria Jacobs

IPC: H01J37/20 ,  F16L11/04 ,  F16L11/12 ,  B01D19/00 ,  H01L21/67

CPC classification number: H01J37/20 ,  F16L11/04 ,  F16L11/12 ,  B01D19/0068 ,  H01J2237/2001 ,  H01L21/67288

Abstract: Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer, a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.