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公开(公告)号：US11556067B2
公开(公告)日：2023-01-17
申请号：US17603687
申请日：2020-03-10
发明人： Sander Catharina Reinier Derks , Daniel Jozef Maria Direcks , Maurice Wilhelmus Leonardus Hendricus Feijts , Pieter Gerardus Mathijs Hoeijmakers , Katja Cornelia Joanna Clasina Moors , Violeta Navarro Paredes , William Peter Van Drent , Jan Steven Christiaan Westerlaken
摘要： A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m−1K−1.
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公开(公告)号：US11982947B2
公开(公告)日：2024-05-14
申请号：US18070155
申请日：2022-11-28
发明人： Sander Catharina Reinier Derks , Daniel Jozef Maria Direcks , Maurice Wilhelmus Leonardus Hendricus Feijts , Pieter Gerardus Mathijs Hoeijmakers , Katja Cornelia Joanna Clasina Moors , Violeta Navarro Paredes , William Peter Van Drent , Jan Steven Christiaan Westerlaken
CPC分类号： G03F7/70916 , G03F7/70033 , G03F7/70891 , H05G2/005 , H05G2/008
摘要： A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m−1 K−1.
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