公开(公告)号：US20230274906A1

公开(公告)日：2023-08-31

申请号：US17901767

申请日：2022-09-01

Applicant: ASML Netherlands B.V.

Inventor： Martinus Gerardus, Maria, Johannes MAASSEN ,  Joost Jeroen OTTENS ,  Long MA ,  Youfei JIANG ,  Weihua YIN ,  Wei-Te LI ,  Xuedong LIU

IPC: H01J37/26 ,  H01J37/147 ,  H01J37/22 ,  H01J37/28

CPC classification number: H01J37/265 ,  H01J37/1474 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/1505 ,  H01J2237/24592 ,  H01J2237/2817

Abstract: An improved system and method for inspection of a sample using a particle beam inspection apparatus, and more particularly, to systems and methods of scanning a sample with a plurality of charged particle beams. An improved method of scanning an area of a sample using N charged particle beams, wherein N is an integer greater than or equal to two, and wherein the area of the sample comprises a plurality of scan sections of N consecutive scan lines, includes moving the sample in a first direction. The method also includes scanning, with a first charged particle beam of the N charged particle beams, first scan lines of at least some scan sections of the plurality of scan sections moving towards a probe spot of the first charged particle beam. The method further includes scanning, with a second charged particle beam of the N charged particle beams, second scan lines of at least some scan sections of the plurality of scan sections moving towards a probe spot of the second charged particle beam.

公开(公告)号：US20210217582A1

公开(公告)日：2021-07-15

申请号：US17251724

申请日：2019-06-07

Applicant: ASML Netherlands B.V.

Inventor： Martinus Gerardus, Maria, Johannes MAASSEN ,  Joost Jeroen OTTENS ,  Long MA ,  Youfei JIANG ,  Weihua YIN ,  Wei-Te LI ,  Xuedong LIU

IPC: H01J37/26 ,  H01J37/147 ,  H01J37/22 ,  H01J37/28

Abstract: An improved system and method for inspection of a sample using a particle beam inspection apparatus, and more particularly, to systems and methods of scanning a sample with a plurality of charged particle beams. An improved method of scanning an area of a sample using N charged particle beams, wherein Nis an integer greater than or equal to two, and wherein the area of the sample comprises a plurality of scan sections of N consecutive scan lines, includes moving the sample in a first direction. The method also includes scanning, with a first charged particle beam of the N charged particle beams, first scan lines of at least some scan sections of the plurality of scan sections moving towards a probe spot of the first charged particle beam. The method further includes scanning, with a second charged particle beam of the N charged particle beams, second scan lines of at least some scan sections of the plurality of scan sections moving towards a probe spot of the second charged particle beam.