公开(公告)号：US11843069B2

公开(公告)日：2023-12-12

申请号：US16703294

申请日：2019-12-04

Applicant: ASML Netherlands B.V.

Inventor： Gianpaolo Lorito ,  Stoyan Nihtianov ,  Xinqing Liang ,  Kenichi Kanai

IPC: H01L31/115 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01L31/115 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441

Abstract: The present disclosure describes a detector used in critical dimension scanning electron microscopes (CD-SEM) and review SEM systems. In one embodiment, the detector includes a semiconductor structure having a p-n junction and a hole through which a scanning beam is passed to a target. The detector also includes a top electrode for the p-n junction (e.g., anode or cathode) that provides an active area for detecting electrons or electromagnetic radiation (e.g., backscattering from the target). The top electrode has a doped layer and can also have a buried portion beneath the doped layer to reduce a series resistance of the top electrode without changing the active area. In another embodiment, an isolation structure can be formed in the semiconductor structure near sidewalls of the hole to electrically isolate the active area from the sidewalls. A method for forming the buried portion of the top electrode is also described.