公开(公告)号：US10324121B2

公开(公告)日：2019-06-18

申请号：US13729524

申请日：2012-12-28

Applicant: Axcelis Technologies, Inc.

Inventor： Edward K. McIntyre ,  Edward J. Ladny ,  Nathaniel Robinson ,  William Davis Lee

IPC: G01R29/24 ,  H01L21/687 ,  H01L21/67 ,  H01L21/683

Abstract: An electrostatic clamp monitoring system has an electrostatic clamp configured to selectively electrostatically clamp a workpiece to a clamping surface via one or more electrodes. A power supply electrically coupled to the electrostatic clamp is configured to selectively supply a clamping voltage to the one or more electrodes. A data acquisition system is coupled to the power supply and configured to measure a current supplied to the one or more electrodes, therein defining a measured current. A controller integrates the measured current over time, therein determining a charge value associated a clamping force between the workpiece and electrostatic clamp. A memory stores the charge value associated with the clamping force over a plurality of clamping cycles, therein defining a plurality of charge values, and the controller determines a clamping capability of the electrostatic clamp based on a comparison of a currently determined charge value to the plurality of charge values.

公开(公告)号：US20140188416A1

公开(公告)日：2014-07-03

申请号：US13729524

申请日：2012-12-28

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： Edward K. McIntyre ,  Edward J. Ladny ,  Nathaniel Robertson ,  William Davis Lee

IPC: G01R29/24

CPC classification number: G01R29/24 ,  H01L21/67288 ,  H01L21/6833 ,  H01L21/68707

Abstract: An electrostatic clamp monitoring system is provided having an electrostatic clamp configured to selectively electrostatically clamp a workpiece to a clamping surface associated therewith via one or more electrodes. A power supply is electrically coupled to the electrostatic clamp, wherein the power supply is configured to selectively supply a clamping voltage to the one or more electrodes of the electrostatic clamp. A data acquisition system is coupled to the power supply and configured to measure a current supplied to the one or more electrodes, therein defining a measured current. A controller integrates the measured current over time, therein determining a charge value associated a clamping force between the workpiece and electrostatic clamp. A memory stores the charge value associated with the clamping force over a plurality of clamping cycles, therein defining a plurality of charge values, and the controller determines a clamping capability of the electrostatic clamp based on a comparison of a currently determined charge value to the plurality of charge values.

Abstract translation: 提供一种静电夹钳监测系统，其具有静电夹持器，其构造成选择性地将工件静电夹持到与其相关联的夹紧表面，经由一个或多个电极。 电源电耦合到静电夹持器，其中电源被配置为选择性地向静电夹的一个或多个电极提供钳位电压。 数据采集​​系统耦合到电源并且被配置为测量提供给一个或多个电极的电流，其中限定测量的电流。 控制器将测量的电流随时间整合，其中确定与工件和静电夹具之间的夹紧力相关联的电荷值。 存储器在多个钳位循环中存储与夹紧力相关联的电荷值，其中限定多个电荷值，并且控制器基于当前确定的电荷值与多个电荷值的比较来确定静电钳位的钳位能力 的电费值。