公开(公告)号：US10324121B2

公开(公告)日：2019-06-18

申请号：US13729524

申请日：2012-12-28

Applicant: Axcelis Technologies, Inc.

Inventor： Edward K. McIntyre ,  Edward J. Ladny ,  Nathaniel Robinson ,  William Davis Lee

IPC: G01R29/24 ,  H01L21/687 ,  H01L21/67 ,  H01L21/683

Abstract: An electrostatic clamp monitoring system has an electrostatic clamp configured to selectively electrostatically clamp a workpiece to a clamping surface via one or more electrodes. A power supply electrically coupled to the electrostatic clamp is configured to selectively supply a clamping voltage to the one or more electrodes. A data acquisition system is coupled to the power supply and configured to measure a current supplied to the one or more electrodes, therein defining a measured current. A controller integrates the measured current over time, therein determining a charge value associated a clamping force between the workpiece and electrostatic clamp. A memory stores the charge value associated with the clamping force over a plurality of clamping cycles, therein defining a plurality of charge values, and the controller determines a clamping capability of the electrostatic clamp based on a comparison of a currently determined charge value to the plurality of charge values.

公开(公告)号：US09633885B2

公开(公告)日：2017-04-25

申请号：US14178719

申请日：2014-02-12

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee

IPC: H01T23/00 ,  H01L21/683 ,  H02N13/00

CPC classification number: H01L21/6833 ,  H01L21/6831 ,  H02N13/00

Abstract: An electrostatic clamp (ESC) has a clamping surface, and first and second pairs of electrodes. Each of the first pair of electrodes are associated with a respective third of the clamping surface, and each of the second pair of electrodes are associated with a respective sixth of the clamping surface. A peripheral region of each of the first and second pairs of electrodes spirals toward the periphery of the clamping surface. A DC mode connects one of each of the first and second pair of electrodes to a positive and the other one of the respective first and second pair of electrodes to a negative of a power supply. An AC mode electrically connects first, second, and third phase terminals of the power supply to one of the first pair of electrodes, the other one of the first pair of electrodes, and both of the second pair of electrodes, respectively.

公开(公告)号：US09847240B2

公开(公告)日：2017-12-19

申请号：US14178795

申请日：2014-02-12

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee

IPC: F28F7/00 ,  H01L21/67 ,  H01L21/683 ,  H01L23/46 ,  F28D1/06 ,  H01L23/40 ,  F28D21/00

CPC classification number: H01L21/67109 ,  F28D1/06 ,  F28D2021/0029 ,  H01L21/6831 ,  H01L23/40 ,  H01L23/46

Abstract: A workpiece support has a vessel having a top interior wall and a bottom interior wall. An interior cavity is defined between the top interior wall and bottom interior wall, wherein a support surface configured to support a workpiece. A plate is positioned within the interior cavity, dividing the interior cavity into a top cavity and a bottom cavity. The top and bottom cavities are fluidly coupled about a periphery of the plate. A first taper defined in one or more of the top interior wall and a top portion of the plate provides a substantially constant volume across a radial cross-section of the top cavity. A second taper defined in one or more of the bottom interior wall and a bottom portion of the plate provides a substantially constant volume across a radial cross-section of the bottom cavity. First and second ports fluidly couple the top and bottom cavities to respective first and second fluid channels.

公开(公告)号：US20150228514A1

公开(公告)日：2015-08-13

申请号：US14178681

申请日：2014-02-12

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee ,  Steve Drummond

IPC: H01L21/67 ,  H01L21/683

CPC classification number: H01L21/67109 ,  H01L21/6833

Abstract: An electrostatic clamping system has an electrostatic chuck having one or more electrodes and a clamping surface and one or more fluid passages therethrough. A plurality of fluid sources has a respective plurality of fluids associated therewith, wherein each of the plurality of fluids are chemically distinct from one another and has a respective viable fluid temperature range associated therewith. A thermal unit is configured to heat and/or cool the plurality of fluids to one or more predetermined temperature setpoints. A valve assembly is configured to selectively fluidly couple each of the plurality of fluid sources to the one or more fluid passages of the electrostatic chuck. A controller is also configured to selectively fluidly couple the one or more fluid passages of the electrostatic chuck with a selected one or more of the plurality of fluid sources via a control of the valve assembly.

Abstract translation: 静电夹持系统具有静电卡盘，该静电卡盘具有一个或多个电极和夹紧表面以及穿过其中的一个或多个流体通道。 多个流体源具有与其相关联的相应的多个流体，其中多个流体中的每一个在化学上彼此不同并且具有与之相关联的相应的可行的流体温度范围。 热单元被配置为将多个流体加热和/或冷却到一个或多个预定温度设定点。 阀组件构造成选择性地将多个流体源中的每一个流体地耦合到静电卡盘的一个或多个流体通道。 控制器还被配置成经由阀组件的控制选择性地将静电卡盘的一个或多个流体通道与多个流体源中选择的一个或多个流体耦合。

公开(公告)号：US09064673B2

公开(公告)日：2015-06-23

申请号：US13915149

申请日：2013-06-11

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee ,  Kevin J. Hoyt ,  David Shanner ,  Jason Beringer

IPC: H01L21/673 ,  H01J37/20 ,  H01J37/317 ,  H01L21/687 ,  H01L21/683

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/201 ,  H01L21/6831 ,  H01L21/68785 ,  Y10S901/31

Abstract: A workpiece carrier comprises a first plate having a first outer diameter, a first inner diameter, and a first recess extending a first distance from the first inner diameter toward the first outer diameter. The workpiece carrier further comprises a second plate having a second outer diameter, a second inner diameter, and a second recess extending a second distance from the second inner diameter toward the second outer diameter. A plurality of mating features associated with the first plate and second plate are configured to selectively fix a position of a first workpiece between the first plate and second plate within the first recess and second recess.

Abstract translation: 工件载体包括具有第一外径，第一内径和从第一内径向第一外径延伸第一距离的第一凹槽的第一板。 工件托架还包括具有第二外径，第二内径和从第二内径向第二外径延伸第二距离的第二凹槽的第二板。 与第一板和第二板相关联的多个配合特征被配置为在第一凹部和第二凹部内选择性地将第一工件的位置固定在第一板和第二板之间。

公开(公告)号：US20150228515A1

公开(公告)日：2015-08-13

申请号：US14178795

申请日：2014-02-12

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee

IPC: H01L21/67 ,  H01L21/683

CPC classification number: H01L21/67109 ,  F28D1/06 ,  F28D2021/0029 ,  H01L21/6831 ,  H01L23/40 ,  H01L23/46

Abstract: A workpiece support has a vessel having a top interior wall and a bottom interior wall. An interior cavity is defined between the top interior wall and bottom interior wall, wherein a support surface configured to support a workpiece. A plate is positioned within the interior cavity, dividing the interior cavity into a top cavity and a bottom cavity. The top and bottom cavities are fluidly coupled about a periphery of the plate. A first taper defined in one or more of the top interior wall and a top portion of the plate provides a substantially constant volume across a radial cross-section of the top cavity. A second taper defined in one or more of the bottom interior wall and a bottom portion of the plate provides a substantially constant volume across a radial cross-section of the bottom cavity. First and second ports fluidly couple the top and bottom cavities to respective first and second fluid channels.

Abstract translation: 工件支撑件具有具有顶部内壁和底部内壁的容器。 内腔被限定在顶部内壁和底部内壁之间，其中支撑表面构造成支撑工件。 板位于内腔内，将内腔分为顶腔和底腔。 顶部和底部腔体围绕板的周边流体耦合。 限定在板的顶部内壁和顶部的一个或多个中的第一锥形在顶部空腔的径向横截面上提供基本恒定的体积。 限定在板的底部内壁和底部中的一个或多个中的第二锥形在底部空腔的径向横截面上提供基本恒定的体积。 第一和第二端口将顶部和底部空腔流体地联接到相应的第一和第二流体通道。

公开(公告)号：US20140188416A1

公开(公告)日：2014-07-03

申请号：US13729524

申请日：2012-12-28

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： Edward K. McIntyre ,  Edward J. Ladny ,  Nathaniel Robertson ,  William Davis Lee

IPC: G01R29/24

CPC classification number: G01R29/24 ,  H01L21/67288 ,  H01L21/6833 ,  H01L21/68707

Abstract: An electrostatic clamp monitoring system is provided having an electrostatic clamp configured to selectively electrostatically clamp a workpiece to a clamping surface associated therewith via one or more electrodes. A power supply is electrically coupled to the electrostatic clamp, wherein the power supply is configured to selectively supply a clamping voltage to the one or more electrodes of the electrostatic clamp. A data acquisition system is coupled to the power supply and configured to measure a current supplied to the one or more electrodes, therein defining a measured current. A controller integrates the measured current over time, therein determining a charge value associated a clamping force between the workpiece and electrostatic clamp. A memory stores the charge value associated with the clamping force over a plurality of clamping cycles, therein defining a plurality of charge values, and the controller determines a clamping capability of the electrostatic clamp based on a comparison of a currently determined charge value to the plurality of charge values.

Abstract translation: 提供一种静电夹钳监测系统，其具有静电夹持器，其构造成选择性地将工件静电夹持到与其相关联的夹紧表面，经由一个或多个电极。 电源电耦合到静电夹持器，其中电源被配置为选择性地向静电夹的一个或多个电极提供钳位电压。 数据采集​​系统耦合到电源并且被配置为测量提供给一个或多个电极的电流，其中限定测量的电流。 控制器将测量的电流随时间整合，其中确定与工件和静电夹具之间的夹紧力相关联的电荷值。 存储器在多个钳位循环中存储与夹紧力相关联的电荷值，其中限定多个电荷值，并且控制器基于当前确定的电荷值与多个电荷值的比较来确定静电钳位的钳位能力 的电费值。

公开(公告)号：US20160175804A1

公开(公告)日：2016-06-23

申请号：US14576549

申请日：2014-12-19

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee ,  William DiVergilio ,  Daniel R. Tieger

IPC: B01J19/12 ,  H01J37/08 ,  C01B35/02 ,  H01J37/317

CPC classification number: C01B35/026 ,  B01J19/121 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/2001

Abstract: Systems and methods for the production of laser induced high mass molecular borane is disclosed for an ion implantation system. The system comprises a laser, a diborane gas source, a heated interaction chamber for generating a high mass molecular borane, a transport system for transferring the high mass molecular borane, and an ion source chamber for generating an ion beam in an ion beam path for implantation of a workpiece. The transport system comprises at least a first and a second flow control component at least a first heated chamber, wherein the first heated chamber is disposed between the first and second flow control components, and wherein the first heated chamber is configured to condense the high mass molecular borane. The laser comprises a CO2 laser configured to irradiate the diborane source gas at a wavelength of about 10.6 μm at a R-16 (973 cm−1) line of excitation.

Abstract translation: 公开了用于离子注入系统的用于生产激光诱导的高质量分子量硼烷的系统和方法。 该系统包括激光器，乙硼烷气体源，用于产生高质量分子量硼烷的加热相互作用室，用于转移高质量分子量硼烷的输送系统和用于在离子束路径中产生离子束的离子源室， 植入工件。 输送系统至少包括第一和第二流量控制部件至少第一加热室，其中第一加热室设置在第一和第二流量控制部件之间，并且其中第一加热室被配置为冷凝高质量 分子硼烷。 激光器包括配置成在R-16（973cm-1）激发线处照射约10.6μm波长的乙硼烷源气体的CO 2激光器。

公开(公告)号：US20150228523A1

公开(公告)日：2015-08-13

申请号：US14178719

申请日：2014-02-12

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee

IPC: H01L21/683 ,  H02N13/00

CPC classification number: H01L21/6833 ,  H01L21/6831 ,  H02N13/00

Abstract: An electrostatic clamping system provides an electrostatic clamp (ESC) having a clamping surface, and a first and second pair of electrodes. Each of the first pair of electrodes are associated with a respective one-third of the clamping surface, and each of the second pair of electrodes are associated with a respective one-sixth of the clamping surface. A peripheral region of each of the first and second pairs of electrodes tapers in width toward the periphery of the clamping surface in a spiral. A power supply selectively outputs a DC and a three-phase AC clamping voltage. A controller selectively operates the ESC in a DC mode and an AC mode. The DC mode connects one of the first pair of electrodes and one of the second pair of electrodes to a positive terminal and the other one of the first pair of electrodes and other one of the second pair of electrodes to a negative terminal of the power supply. The AC mode electrically connects a first phase terminal of the power supply to one of the first pair of electrodes, a second phase terminal of the power supply to the other one of the first pair of electrodes, and a third phase terminal of the power supply to both of the second pair of electrodes.

Abstract translation: 静电夹紧系统提供具有夹紧表面的静电夹（ESC）和第一和第二对电极。 第一对电极中的每一个与夹持表面的相应的三分之一相关联，并且第二对电极中的每一个与夹紧表面的相应的六分之一相关联。 第一对电极对和第二对电极中的每一个的周边区域以螺旋方式朝向夹紧表面的周边宽度变窄。 电源选择性地输出DC和三相交流钳位电压。 控制器以DC模式和AC模式选择性地操作ESC。 DC模式将第一对电极和第二对电极中的一个连接到正极端子，将第一对电极中的另一个电极和第二对电极中的另一个连接到电源的负极端子 。 AC模式将电源的第一相位端子连接到第一对电极中的一个电极，将电源的第二相位端子连接到第一对电极中的另一个，以及电源的第三相位端子 到第二对电极。

公开(公告)号：US20140361197A1

公开(公告)日：2014-12-11

申请号：US13915149

申请日：2013-06-11

Applicant: Axcelis Technologies, Inc.

Inventor： William Davis Lee ,  Kevin J. Hoyt ,  David Shanner ,  Jason Beringer

IPC: H01J37/20 ,  H01J37/317 ,  H01L21/683 ,  B23Q3/18

CPC classification number: H01J37/20 ,  H01J37/3171 ,  H01J2237/08 ,  H01J2237/2007 ,  H01J2237/201 ,  H01L21/6831 ,  H01L21/68785 ,  Y10S901/31

Abstract: A workpiece carrier comprises a first plate having a first outer diameter, a first inner diameter, and a first recess extending a first distance from the first inner diameter toward the first outer diameter. The workpiece carrier further comprises a second plate having a second outer diameter, a second inner diameter, and a second recess extending a second distance from the second inner diameter toward the second outer diameter. A plurality of mating features associated with the first plate and second plate are configured to selectively fix a position of a first workpiece between the first plate and second plate within the first recess and second recess.

Abstract translation: 工件载体包括具有第一外径，第一内径和从第一内径向第一外径延伸第一距离的第一凹槽的第一板。 工件托架还包括具有第二外径，第二内径和从第二内径向第二外径延伸第二距离的第二凹槽的第二板。 与第一板和第二板相关联的多个配合特征被配置为在第一凹部和第二凹部内选择性地将第一工件的位置固定在第一板和第二板之间。