公开(公告)号：US10215692B2

公开(公告)日：2019-02-26

申请号：US15519011

申请日：2015-10-16

Applicant: Agency for Science, Technology and Research

Inventor： Jifang Tao ,  Hong Cai ,  Alex Yuandong Gu ,  Hyun Kee Chang

IPC: G02B6/00 ,  G02B6/10 ,  G01N21/3504 ,  G02B6/12

Abstract: There is provided an optical waveguide structure, including a substrate, an insulating layer disposed on the substrate whereby the insulating layer includes an air slot formed therein, a first material layer suspended over the air slot whereby the first material layer constitutes a waveguide core of the optical waveguide structure, and a second material layer disposed over the waveguide core whereby the waveguide core is suspended over the air slot by the second material layer. There is also provided an optical gas sensor incorporating the optical waveguide structure and methods of fabrication thereof.

公开(公告)号：US20170227456A1

公开(公告)日：2017-08-10

申请号：US15519011

申请日：2015-10-16

Applicant: Agency for Science, Technology and Research

Inventor： Jifang Tao ,  Hong Cai ,  Alex Yuandong Gu ,  Hyun Kee Chang

IPC: G01N21/3504 ,  G02B6/10

CPC classification number: G01N21/3504 ,  G02B6/00 ,  G02B6/10 ,  G02B2006/12097 ,  G02B2006/12138 ,  G02B2006/12176

Abstract: There is provided an optical waveguide structure, including a substrate, an insulating layer disposed on the substrate whereby the insulating layer includes an air slot formed therein, a first material layer suspended over the air slot whereby the first material layer constitutes a waveguide core of the optical waveguide structure, and a second material layer disposed over the waveguide core whereby the waveguide core is suspended over the air slot by the second material layer. There is also provided an optical gas sensor incorporating the optical waveguide structure and methods of fabrication thereof.