公开(公告)号：US09651426B2

公开(公告)日：2017-05-16

申请号：US14788534

申请日：2015-06-30

Applicant: Agilent Technologies, Inc.

Inventor： Adam Kleczewski ,  Richard P Tella ,  Dower Cameron Bricker ,  Yang Han

IPC: G01J4/02 ,  H01S5/34 ,  H01S5/00 ,  H01S5/40 ,  G02B5/30 ,  G02B27/28 ,  G02B26/00

CPC classification number: G01J4/02 ,  G01N2021/217 ,  G01N2021/556 ,  G02B5/3058 ,  G02B26/00 ,  G02B27/286 ,  G02F1/0136 ,  H01S5/005 ,  H01S5/0071 ,  H01S5/3401 ,  H01S5/3402 ,  H01S5/4012 ,  H01S5/4075

Abstract: A light source having first and second wire-grid polarizers and a laser that emits a beam of linearly polarized light that is characterized by a propagation direction is disclosed. The first wire-grid polarization filter is characterized by a first linear polarization pass direction and a first actuator for causing the first linear polarization pass direction to rotate relative to the beam of linearly polarized light. The second wire-grid polarization filter is characterized by a second linear polarization pass direction and a second actuator for causing the second linear polarization pass direction to rotate relative to the beam of linearly polarized light. A controller sets the first and second linear polarization pass directions to provide linearly polarized light having a specified polarization direction.