公开(公告)号：US20080248194A1

公开(公告)日：2008-10-09

申请号：US11948320

申请日：2007-11-30

申请人： Akinobu NASU ,  Shyuan-Fang Chen ,  Wen-Jin Li ,  Yi-Tsung Chen

发明人： Akinobu NASU ,  Shyuan-Fang Chen ,  Wen-Jin Li ,  Yi-Tsung Chen

IPC分类号： B05D5/12

CPC分类号： H05K3/181 ,  C23C18/1651 ,  C23C18/1696 ,  C23C18/1841 ,  C23C18/30 ,  C23C18/40 ,  H05K3/244 ,  H05K2201/0344 ,  H05K2203/0716 ,  H05K2203/072

摘要： Methods and apparatus for producing a copper layer on substrate in a flat panel display manufacturing process, where the copper is electrodelessly deposited on a substrate to form a copper interconnection layer. A copper solution containing: CuSO4 5H2O as a copper source, potassium sodium tartrate or trisodium citrate as a complexing agent, glyoxylate, glyoxilic acid or sodium phosphate as a reducing agent, a sulfur organic compound as a stabilizing agent, and a pH adjusting agent, is used to form the copper interconnection layer on the substrate.

摘要翻译： 在平板显示器制造工艺中在基板上制造铜层的方法和装置，其中铜无电极沉积在基板上以形成铜互连层。 作为铜源的包含CuSO 4 H 2 O 2 O 2的铜溶液，作为络合剂的酒石酸钾钠盐或柠檬酸钠盐，乙醛酸盐，乙氧基化磷酸盐或磷酸钠作为还原剂 作为稳定剂的硫有机化合物和pH调节剂，用于在基板上形成铜互连层。

公开(公告)号：US20100317191A1

公开(公告)日：2010-12-16

申请号：US12066929

申请日：2007-03-15

申请人： Akinobu Nasu ,  Yi-Tsung Chen ,  Shyuan-Fang Chen

发明人： Akinobu Nasu ,  Yi-Tsung Chen ,  Shyuan-Fang Chen

IPC分类号： H01L21/768

CPC分类号： H01L27/124

摘要： A method of depositing a copper interconnection layer on a substrate for use in a flat panel display interconnection system, comprising the steps of: a) coating said substrate with a photoresist layer; b) patterning said photoresist layer to obtain a patterned photoresist substrate comprising at least one trench patterned into said photoresist layer; c) providing a first catalyzation layer onto the patterned photoresist substrate; d) providing an electroless plated layer of an insulation layer deposited onto said first catalyzation layer; e) removing the successively superimposed photoresist layer, catalyzation layer and insulation layer except in the at least one trench, to obtain a pattern of the first catalyzation layer with an insulation layer deposited thereon.

摘要翻译： 一种在用于平板显示器互连系统的衬底上沉积铜互连层的方法，包括以下步骤：a）用光致抗蚀剂层涂覆所述衬底; b）图案化所述光致抗蚀剂层以获得图案化的光致抗蚀剂基底，其包括图案化到所述光致抗蚀剂层中的至少一个沟槽; c）在图案化的光致抗蚀剂基底上提供第一催化层; d）提供沉积在所述第一催化层上的绝缘层的化学镀层; e）除去所述至少一个沟槽中的连续叠加的光致抗蚀剂层，催化层和绝缘层，以获得其上沉积有绝缘层的第一催化层的图案。

公开(公告)号：US20090050202A1

公开(公告)日：2009-02-26

申请号：US11969225

申请日：2008-01-04

申请人： Chen-Hsun Du ,  Yun-Sheng Chung ,  Shyuan-Fang Chen ,  Chien-Rong Huang

发明人： Chen-Hsun Du ,  Yun-Sheng Chung ,  Shyuan-Fang Chen ,  Chien-Rong Huang

IPC分类号： H01L31/0224 ,  H01L31/04

CPC分类号： H01L31/022425 ,  Y02E10/50

摘要： The invention is directed to a solar cell. The solar cell comprises a silicon layer, a front side electrode and a back side electrode. The silicon layer has a first surface and a second surface. The front side electrode is located on the first surface of the silicon layer. The back side electrode is located on the second surface of the silicon layer. Further, the back side electrode comprises a passivation layer, a first conductive layer and a second conductive layer. The passivation layer is located on the second surface of the silicon layer and has a plurality of holes penetrating through the passivation layer. The first conductive layer is located on the passivation layer and is electrically connected to the silicon layer through the holes. The second conductive layer is located on the first conductive layer.

摘要翻译： 本发明涉及一种太阳能电池。 太阳能电池包括硅层，前侧电极和背面电极。 硅层具有第一表面和第二表面。 前侧电极位于硅层的第一表面上。 背面电极位于硅层的第二表面上。 此外，背面电极包括钝化层，第一导电层和第二导电层。 钝化层位于硅层的第二表面上，并且具有贯穿钝化层的多个孔。 第一导电层位于钝化层上，并通过该孔与硅层电连接。 第二导电层位于第一导电层上。