公开(公告)号：US07161273B2

公开(公告)日：2007-01-09

申请号：US10287355

申请日：2002-11-04

申请人： Akira Akiba ,  Keisuke Uno ,  Masao Jojima ,  Tomonori Seki ,  Koji Sano

发明人： Akira Akiba ,  Keisuke Uno ,  Masao Jojima ,  Tomonori Seki ,  Koji Sano

IPC分类号： H02N1/00

CPC分类号： H01H59/0009 ,  H01H2001/0084 ,  H01H2059/0018 ,  H01H2059/0072

摘要： A fixed voltage and a movable electrode are placed face to face with each other, and an insulating film is formed on the surface of the fixed electrode. The insulating film is made of a nitride film (SiN) as a main material, with oxide films (SiO2) being formed on the front and rear surfaces of the nitride film. Moreover, a plurality of protrusions are formed on an area facing the movable electrode of the upper face of the insulating film. The charge quantity in the insulating film is mainly determined by a film thickness of the oxide film, and the nitride film is used for maintaining a sufficient film thickness required for the voltage proof characteristic. Thereby, it is possible to suppress variations in operational voltage characteristics such as on-voltage and off-voltage in an electrostatic actuator so as to prevent phenomena in which the electrostatic actuator fails to turn on even when a rated voltage is applied to the electrostatic actuator and in which the electrostatic actuator fails to turn off even when the driving voltage is turned off.

摘要翻译： 固定电压和可动电极彼此面对地放置，并且在固定电极的表面上形成绝缘膜。 绝缘膜由氮化物膜（SiN）作为主要材料制成，在氮化膜的正面和背面形成有氧化物膜（SiO 2/2）。 此外，在与绝缘膜的上表面的可动电极相对的区域上形成多个突起。 绝缘膜中的电荷量主要由氧化膜的膜厚确定，并且氮化膜用于保持耐电压特性所需的足够的膜厚度。 由此，可以抑制静电致动器中的导通电压和截止电压等工作电压特性的变化，从而防止静电致动器即使向静电致动器施加额定电压也不能接通的现象 并且即使当驱动电压关闭时静电致动器也不能关闭。

公开(公告)号：US20060208328A1

公开(公告)日：2006-09-21

申请号：US11376972

申请日：2006-03-16

申请人： Koji Sano ,  Isamu Kimura ,  Masao Jojima

发明人： Koji Sano ,  Isamu Kimura ,  Masao Jojima

IPC分类号： H01L29/84

CPC分类号： H01H59/0009

摘要： An electrostatic micro switch includes a fixed electrode disposed on a fixed substrate; a movable substrate elastically supported by the fixed substrate, the movable substrate including a movable electrode facing the fixed electrode. The movable substrate includes a semiconductor including a plurality of regions having different values of resistivity and a region of high resistivity is disposed near the movable electrode.

摘要翻译： 静电微动开关包括设置在固定基板上的固定电极; 由所述固定基板弹性支撑的可动基板，所述可动基板包括面向所述固定电极的可动电极。 可移动基板包括在可动电极附近设置包括具有不同电阻率值的多个区域和高电阻率区域的半导体。

公开(公告)号：US07719066B2

公开(公告)日：2010-05-18

申请号：US11376972

申请日：2006-03-16

申请人： Koji Sano ,  Isamu Kimura ,  Masao Jojima

发明人： Koji Sano ,  Isamu Kimura ,  Masao Jojima

IPC分类号： H01L27/14 ,  H01H61/00

CPC分类号： H01H59/0009

摘要： An electrostatic micro switch includes a fixed electrode disposed on a fixed substrate; a movable substrate elastically supported by the fixed substrate, the movable substrate including a movable electrode facing the fixed electrode. The movable substrate includes a semiconductor including a plurality of regions having different values of resistivity and a region of high resistivity is disposed near the movable electrode.

摘要翻译： 静电微动开关包括设置在固定基板上的固定电极; 由所述固定基板弹性支撑的可动基板，所述可动基板包括面向所述固定电极的可动电极。 可移动基板包括在可动电极附近设置包括具有不同电阻率值的多个区域和高电阻率区域的半导体。

公开(公告)号：US20070269199A1

公开(公告)日：2007-11-22

申请号：US11804021

申请日：2007-05-16

申请人： Yoshikazu Mori ,  Masao Jojima ,  Hiroshi Imamoto

发明人： Yoshikazu Mori ,  Masao Jojima ,  Hiroshi Imamoto

IPC分类号： G03B41/00

CPC分类号： G02B26/0858 ,  B41J2/471 ,  G02B26/0833 ,  G02B26/105

摘要： A driving device includes: a movable frame; a frame shaped supporting body arranged on an outer side of the movable frame; and bending drive elements arranged on a surface of the movable frame. The supporting body and the movable frame each have two sets of opposing sides. Supporting parts arranged on first set of opposing sides of the supporting body support first set of opposing sides of the movable frame. The bending drive elements are arranged on the first set of opposing sides of the movable frame. A region arranged with the bending drive elements of the movable frame bends in a thickness direction of the movable frame.

摘要翻译： 驱动装置包括：可动框架; 布置在所述可移动框架的外侧上的框架状支撑体; 以及布置在可移动框架的表面上的弯曲驱动元件。 支撑体和可动框架各具有两组相对的侧面。 布置在支撑体的第一组相对侧上的支撑部件支撑可移动框架的第一组相对侧面。 弯曲驱动元件布置在可移动框架的第一组相对侧上。 布置有可动框架的弯曲驱动元件的区域在可移动框架的厚度方向上弯曲。