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公开(公告)号:US07161273B2
公开(公告)日:2007-01-09
申请号:US10287355
申请日:2002-11-04
申请人: Akira Akiba , Keisuke Uno , Masao Jojima , Tomonori Seki , Koji Sano
发明人: Akira Akiba , Keisuke Uno , Masao Jojima , Tomonori Seki , Koji Sano
IPC分类号: H02N1/00
CPC分类号: H01H59/0009 , H01H2001/0084 , H01H2059/0018 , H01H2059/0072
摘要: A fixed voltage and a movable electrode are placed face to face with each other, and an insulating film is formed on the surface of the fixed electrode. The insulating film is made of a nitride film (SiN) as a main material, with oxide films (SiO2) being formed on the front and rear surfaces of the nitride film. Moreover, a plurality of protrusions are formed on an area facing the movable electrode of the upper face of the insulating film. The charge quantity in the insulating film is mainly determined by a film thickness of the oxide film, and the nitride film is used for maintaining a sufficient film thickness required for the voltage proof characteristic. Thereby, it is possible to suppress variations in operational voltage characteristics such as on-voltage and off-voltage in an electrostatic actuator so as to prevent phenomena in which the electrostatic actuator fails to turn on even when a rated voltage is applied to the electrostatic actuator and in which the electrostatic actuator fails to turn off even when the driving voltage is turned off.
摘要翻译: 固定电压和可动电极彼此面对地放置,并且在固定电极的表面上形成绝缘膜。 绝缘膜由氮化物膜(SiN)作为主要材料制成,在氮化膜的正面和背面形成有氧化物膜(SiO 2/2)。 此外,在与绝缘膜的上表面的可动电极相对的区域上形成多个突起。 绝缘膜中的电荷量主要由氧化膜的膜厚确定,并且氮化膜用于保持耐电压特性所需的足够的膜厚度。 由此,可以抑制静电致动器中的导通电压和截止电压等工作电压特性的变化,从而防止静电致动器即使向静电致动器施加额定电压也不能接通的现象 并且即使当驱动电压关闭时静电致动器也不能关闭。
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2.
公开(公告)号:US08456037B2
公开(公告)日:2013-06-04
申请号:US12838526
申请日:2010-07-19
申请人: Akira Akiba , Koichi Ikeda
发明人: Akira Akiba , Koichi Ikeda
CPC分类号: H01P1/127 , H01H59/0009
摘要: A shunt switch allowed to improve isolation, a semiconductor device, a module and an electronic device each of which includes the shunt switch are provided. The shunt switch includes: a transmission line, a ground; and a shunt line electrically coupling the transmission line and the ground, in which two or more of the shunt lines are arranged in parallel to one another, and an impedance between the two or more shunt lines is higher than an impedance of the transmission line.
摘要翻译: 提供了一种分流开关,用于改善隔离度,提供包括分流开关的半导体器件,模块和电子器件。 分流开关包括:传输线,地线; 以及电耦合所述传输线和地线的并联线,其中所述并联线路中的两个或更多个彼此平行布置,并且所述两个或更多个分流线路之间的阻抗高于所述传输线路的阻抗。
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公开(公告)号:US07893783B2
公开(公告)日:2011-02-22
申请号:US12123913
申请日:2008-05-20
申请人: Shinya Morita , Akira Akiba
发明人: Shinya Morita , Akira Akiba
IPC分类号: H03B5/30
CPC分类号: H03H9/2431 , H03H9/2463 , H03H2009/02354 , H03H2009/02511
摘要: Disclosed is a resonator including a plurality of resonator elements each including at least oscillation parts and lower electrodes with an intervening space therebetween, in which the plurality of resonator elements are disposed in a closed system and the oscillation parts of the plurality of resonator elements are continuously formed in an integrated manner.
摘要翻译: 公开了一种谐振器,其包括多个谐振元件,每个谐振器元件至少包括振荡部分和下部电极,其间具有中间空间,其中多个谐振器元件设置在闭合系统中,并且多个谐振器元件的振荡部分连续地 形成一体的方式。
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公开(公告)号:US08704116B2
公开(公告)日:2014-04-22
申请号:US12929382
申请日:2011-01-20
申请人: Akira Akiba , Koichi Ikeda
发明人: Akira Akiba , Koichi Ikeda
IPC分类号: H01H57/00
CPC分类号: H01H57/00
摘要: There is provided a contact switch including: a plurality of first contact points arranged in parallel on a substrate; a movable member including a plurality of beams facing the plurality of first contact points, and formed to be slidable along an alignment direction of the first contact points within a face of the substrate; and a plurality of second contact points provided on faces of the beams, opposing the first contact points, respectively.
摘要翻译: 提供了一种接触开关,包括:平行布置在基板上的多个第一接触点; 可动构件,其包括面对所述多个第一接触点的多个梁,并且形成为能够沿着所述基板的表面内的所述第一接触点的排列方向滑动; 以及分别设置在所述梁的与所述第一接触点相对的面上的多个第二接触点。
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公开(公告)号:US08546911B2
公开(公告)日:2013-10-01
申请号:US12847182
申请日:2010-07-30
申请人: Akira Akiba , Shun Mitarai , Koichi Ikeda
发明人: Akira Akiba , Shun Mitarai , Koichi Ikeda
IPC分类号: H01L27/08
CPC分类号: H01L23/5227 , H01L23/5223 , H01L23/5228 , H01L2924/0002 , H01L2924/09701 , H01L2924/3011 , H03H7/0115 , H03H7/175 , H03H7/1775 , H03H2001/0064 , H01L2924/00
摘要: A small high frequency device that is able to inhibit generation of an eddy current and a parasitic capacity and shows superior high frequency characteristics is provided. The high frequency device includes: a substrate having a depression; a dielectric layer over the substrate; and a plurality of electronic devices which are provided in the dielectric layer or on the dielectric layer, and at least one of which is opposed to the depression.
摘要翻译: 提供能够抑制涡电流的产生和寄生容量并显示出优异的高频特性的小型高频器件。 高频器件包括:具有凹陷的衬底; 介电层; 以及多个电子器件,其设置在电介质层或电介质层上,并且其中至少一个与凹陷相对。
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6.
公开(公告)号:US20110024273A1
公开(公告)日:2011-02-03
申请号:US12838526
申请日:2010-07-19
申请人: Akira Akiba , Koichi Ikeda
发明人: Akira Akiba , Koichi Ikeda
IPC分类号: H01H59/00
CPC分类号: H01P1/127 , H01H59/0009
摘要: A shunt switch allowed to improve isolation, a semiconductor device, a module and an electronic device each of which includes the shunt switch are provided. The shunt switch includes: a transmission line, a ground; and a shunt line electrically coupling the transmission line and the ground, in which two or more of the shunt lines are arranged in parallel to one another, and an impedance between the two or more shunt lines is higher than an impedance of the transmission line.
摘要翻译: 提供了一种分流开关,用于改善隔离度,提供包括分流开关的半导体器件,模块和电子器件。 分流开关包括:传输线,地线; 以及电耦合所述传输线和地线的并联线,其中所述并联线路中的两个或更多个彼此平行布置,并且所述两个或更多个分流线路之间的阻抗高于所述传输线路的阻抗。
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公开(公告)号:US08952856B2
公开(公告)日:2015-02-10
申请号:US12929273
申请日:2011-01-12
申请人: Akira Akiba , Koichi Ikeda
发明人: Akira Akiba , Koichi Ikeda
IPC分类号: H01Q9/00
CPC分类号: H01Q9/00
摘要: A transmission/reception element includes: a plurality of metal layers each disposed with space from another; and a switch for controlling electrical coupling between the metal layers. The switch includes a contact-point group including a plurality of contact-point pairs each disposed in parallel between each two of the metal layers, and a drive section mechanically driving the contact-point group for state change of each of the contact-point pairs between in-contact and no-contact.
摘要翻译: 发送/接收元件包括:多个金属层,每个金属层与另一个间隔设置; 以及用于控制金属层之间的电耦合的开关。 该开关包括一个接触点组,该接点组包括平行于每两个金属层之间的多个接触点对,以及驱动部分,用于机械地驱动每个接触点对的状态变化的接触点组 在联系和不接触之间。
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公开(公告)号:US07566956B2
公开(公告)日:2009-07-28
申请号:US11425077
申请日:2006-06-19
申请人: Shun Mitarai , Koichi Ikeda , Masahiro Tada , Akira Akiba , Shinya Morita
发明人: Shun Mitarai , Koichi Ikeda , Masahiro Tada , Akira Akiba , Shinya Morita
IPC分类号: H01L23/02
CPC分类号: B81C1/00238
摘要: The present invention provides a semiconductor composite device including a semiconductor device formed on or in a substrate, an insulating film formed on the substrate so as to cover the semiconductor device, a micro electro mechanical portion formed on the insulating film, and a wiring layer connected to the semiconductor device and the micro electro mechanical portion.
摘要翻译: 本发明提供一种半导体复合器件,其包括形成在衬底上或衬底中的半导体器件,形成在衬底上以覆盖半导体器件的绝缘膜,形成在绝缘膜上的微机电部分和连接的布线层 到半导体器件和微机电部分。
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公开(公告)号:US20060289955A1
公开(公告)日:2006-12-28
申请号:US11425077
申请日:2006-06-19
申请人: Shun Mitarai , Koichi Ikeda , Masahiro Tada , Akira Akiba , Shinya Morita
发明人: Shun Mitarai , Koichi Ikeda , Masahiro Tada , Akira Akiba , Shinya Morita
CPC分类号: B81C1/00238
摘要: The present invention provides a semiconductor composite device including a semiconductor device formed on or in a substrate, an insulating film formed on the substrate so as to cover the semiconductor device, a micro electro mechanical portion formed on the insulating film, and a wiring layer connected to the semiconductor device and the micro electro mechanical portion.
摘要翻译: 本发明提供一种半导体复合器件,其包括形成在衬底上或衬底中的半导体器件,形成在衬底上以覆盖半导体器件的绝缘膜,形成在绝缘膜上的微机电部分和连接的布线层 到半导体器件和微机电部分。
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公开(公告)号:US08610520B2
公开(公告)日:2013-12-17
申请号:US13155002
申请日:2011-06-07
申请人: Joerg Froemel , Thomas Gessner , Christian Kaufmann , Stefan Leidich , Markus Nowack , Steffen Kurth , Andreas Bertz , Koichi Ikeda , Akira Akiba
发明人: Joerg Froemel , Thomas Gessner , Christian Kaufmann , Stefan Leidich , Markus Nowack , Steffen Kurth , Andreas Bertz , Koichi Ikeda , Akira Akiba
CPC分类号: H01H59/0009 , H01H1/20 , H01H2001/0078 , H01P1/127
摘要: An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line, respectively. The ground line is formed with a contact bar that leads through the gap of the signal line for forming the Ohmic contact between the contact beam and the ground line. A contact metallization is provided at least on top and on the side walls of the contact beam, of the signal line and of the ground line.
摘要翻译: 一种静电致动的微机械开关装置,其具有形成在基板的主体中的可移动元件,用于通过可移动元件在基板的平面中的水平移动来闭合和释放至少一个欧姆接触。 开关装置具有带有固定驱动电极和可动电极的梳状电极的驱动器。 可移动推杆与可动电极机械连接,延伸穿过电极,在一侧具有可动接触元件,以及至少一个复位弹簧。 信号线有两个部分被间隙中断。 微机械开关器件处于分流配置,具有低损耗,在宽频率范围内的高隔离度,低致动电压下的低开关时间和足够的可靠性。 信号线的线路阻抗及其变化尽可能小。 开关器件处于分流配置,用于闭合和释放接地线与信号线之间的欧姆接触。 接触元件具有至少部分地与信号线相对延伸并且分别电信号和机械地连接到信号线的两个部分的可动接触梁。 接地线形成有接触杆,其通过信号线的间隙,以形成接触梁和接地线之间的欧姆接触。 接触金属化至少在信号线和接地线的接触梁的顶部和侧壁上提供。
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