Antistatic mechanism of an electrostatic actuator
    1.
    发明授权
    Antistatic mechanism of an electrostatic actuator 失效
    静电致动器的抗静电机构

    公开(公告)号:US07161273B2

    公开(公告)日:2007-01-09

    申请号:US10287355

    申请日:2002-11-04

    IPC分类号: H02N1/00

    摘要: A fixed voltage and a movable electrode are placed face to face with each other, and an insulating film is formed on the surface of the fixed electrode. The insulating film is made of a nitride film (SiN) as a main material, with oxide films (SiO2) being formed on the front and rear surfaces of the nitride film. Moreover, a plurality of protrusions are formed on an area facing the movable electrode of the upper face of the insulating film. The charge quantity in the insulating film is mainly determined by a film thickness of the oxide film, and the nitride film is used for maintaining a sufficient film thickness required for the voltage proof characteristic. Thereby, it is possible to suppress variations in operational voltage characteristics such as on-voltage and off-voltage in an electrostatic actuator so as to prevent phenomena in which the electrostatic actuator fails to turn on even when a rated voltage is applied to the electrostatic actuator and in which the electrostatic actuator fails to turn off even when the driving voltage is turned off.

    摘要翻译: 固定电压和可动电极彼此面对地放置,并且在固定电极的表面上形成绝缘膜。 绝缘膜由氮化物膜(SiN)作为主要材料制成,在氮化膜的正面和背面形成有氧化物膜(SiO 2/2)。 此外,在与绝缘膜的上表面的可动电极相对的区域上形成多个突起。 绝缘膜中的电荷量主要由氧化膜的膜厚确定,并且氮化膜用于保持耐电压特性所需的足够的膜厚度。 由此,可以抑制静电致动器中的导通电压和截止电压等工作电压特性的变化,从而防止静电致动器即使向静电致动器施加额定电压也不能接通的现象 并且即使当驱动电压关闭时静电致动器也不能关闭。

    Shunt switch, semiconductor device, module and electronic device
    2.
    发明授权
    Shunt switch, semiconductor device, module and electronic device 有权
    分流开关,半导体器件,模块和电子器件

    公开(公告)号:US08456037B2

    公开(公告)日:2013-06-04

    申请号:US12838526

    申请日:2010-07-19

    IPC分类号: G05F1/10 H01H51/34

    CPC分类号: H01P1/127 H01H59/0009

    摘要: A shunt switch allowed to improve isolation, a semiconductor device, a module and an electronic device each of which includes the shunt switch are provided. The shunt switch includes: a transmission line, a ground; and a shunt line electrically coupling the transmission line and the ground, in which two or more of the shunt lines are arranged in parallel to one another, and an impedance between the two or more shunt lines is higher than an impedance of the transmission line.

    摘要翻译: 提供了一种分流开关,用于改善隔离度,提供包括分流开关的半导体器件,模块和电子器件。 分流开关包括:传输线,地线; 以及电耦合所述传输线和地线的并联线,其中所述并联线路中的两个或更多个彼此平行布置,并且所述两个或更多个分流线路之间的阻抗高于所述传输线路的阻抗。

    Resonator, oscillator, and communication apparatus
    3.
    发明授权
    Resonator, oscillator, and communication apparatus 有权
    谐振器,振荡器和通信设备

    公开(公告)号:US07893783B2

    公开(公告)日:2011-02-22

    申请号:US12123913

    申请日:2008-05-20

    IPC分类号: H03B5/30

    摘要: Disclosed is a resonator including a plurality of resonator elements each including at least oscillation parts and lower electrodes with an intervening space therebetween, in which the plurality of resonator elements are disposed in a closed system and the oscillation parts of the plurality of resonator elements are continuously formed in an integrated manner.

    摘要翻译: 公开了一种谐振器,其包括多个谐振元件,每个谐振器元件至少包括振荡部分和下部电极,其间具有中间空间,其中多个谐振器元件设置在闭合系统中,并且多个谐振器元件的振荡部分连续地 形成一体的方式。

    Lateral motion micro-electro-mechanical system contact switch
    4.
    发明授权
    Lateral motion micro-electro-mechanical system contact switch 有权
    横向运动微机电系统接触开关

    公开(公告)号:US08704116B2

    公开(公告)日:2014-04-22

    申请号:US12929382

    申请日:2011-01-20

    IPC分类号: H01H57/00

    CPC分类号: H01H57/00

    摘要: There is provided a contact switch including: a plurality of first contact points arranged in parallel on a substrate; a movable member including a plurality of beams facing the plurality of first contact points, and formed to be slidable along an alignment direction of the first contact points within a face of the substrate; and a plurality of second contact points provided on faces of the beams, opposing the first contact points, respectively.

    摘要翻译: 提供了一种接触开关,包括:平行布置在基板上的多个第一接触点; 可动构件,其包括面对所述多个第一接触点的多个梁,并且形成为能够沿着所述基板的表面内的所述第一接触点的排列方向滑动; 以及分别设置在所述梁的与所述第一接触点相对的面上的多个第二接触点。

    SHUNT SWITCH, SEMICONDUCTOR DEVICE, MODULE AND ELECTRONIC DEVICE
    6.
    发明申请
    SHUNT SWITCH, SEMICONDUCTOR DEVICE, MODULE AND ELECTRONIC DEVICE 有权
    分路开关,半导体器件,模块和电子器件

    公开(公告)号:US20110024273A1

    公开(公告)日:2011-02-03

    申请号:US12838526

    申请日:2010-07-19

    IPC分类号: H01H59/00

    CPC分类号: H01P1/127 H01H59/0009

    摘要: A shunt switch allowed to improve isolation, a semiconductor device, a module and an electronic device each of which includes the shunt switch are provided. The shunt switch includes: a transmission line, a ground; and a shunt line electrically coupling the transmission line and the ground, in which two or more of the shunt lines are arranged in parallel to one another, and an impedance between the two or more shunt lines is higher than an impedance of the transmission line.

    摘要翻译: 提供了一种分流开关,用于改善隔离度,提供包括分流开关的半导体器件,模块和电子器件。 分流开关包括:传输线,地线; 以及电耦合所述传输线和地线的并联线,其中所述并联线路中的两个或更多个彼此平行布置,并且所述两个或更多个分流线路之间的阻抗高于所述传输线路的阻抗。

    Transmission/reception element for switching radiation frequency
    7.
    发明授权
    Transmission/reception element for switching radiation frequency 有权
    用于切换辐射频率的发射/接收元件

    公开(公告)号:US08952856B2

    公开(公告)日:2015-02-10

    申请号:US12929273

    申请日:2011-01-12

    IPC分类号: H01Q9/00

    CPC分类号: H01Q9/00

    摘要: A transmission/reception element includes: a plurality of metal layers each disposed with space from another; and a switch for controlling electrical coupling between the metal layers. The switch includes a contact-point group including a plurality of contact-point pairs each disposed in parallel between each two of the metal layers, and a drive section mechanically driving the contact-point group for state change of each of the contact-point pairs between in-contact and no-contact.

    摘要翻译: 发送/接收元件包括:多个金属层,每个金属层与另一个间隔设置; 以及用于控制金属层之间的电耦合的开关。 该开关包括一个接触点组,该接点组包括平行于每两个金属层之间的多个接触点对,以及驱动部分,用于机械地驱动每个接触点对的状态变化的接触点组 在联系和不接触之间。

    Electrostatically actuated micro-mechanical switching device
    10.
    发明授权
    Electrostatically actuated micro-mechanical switching device 有权
    静电致动微机械开关装置

    公开(公告)号:US08610520B2

    公开(公告)日:2013-12-17

    申请号:US13155002

    申请日:2011-06-07

    IPC分类号: H01H51/22 H01P1/10

    摘要: An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line, respectively. The ground line is formed with a contact bar that leads through the gap of the signal line for forming the Ohmic contact between the contact beam and the ground line. A contact metallization is provided at least on top and on the side walls of the contact beam, of the signal line and of the ground line.

    摘要翻译: 一种静电致动的微机械开关装置,其具有形成在基板的主体中的可移动元件,用于通过可移动元件在基板的平面中的水平移动来闭合和释放至少一个欧姆接触。 开关装置具有带有固定驱动电极和可动电极的梳状电极的驱动器。 可移动推杆与可动电极机械连接,延伸穿过电极,在一侧具有可动接触元件,以及至少一个复位弹簧。 信号线有两个部分被间隙中断。 微机械开关器件处于分流配置,具有低损耗,在宽频率范围内的高隔离度,低致动电压下的低开关时间和足够的可靠性。 信号线的线路阻抗及其变化尽可能小。 开关器件处于分流配置,用于闭合和释放接地线与信号线之间的欧姆接触。 接触元件具有至少部分地与信号线相对延伸并且分别电信号和机械地连接到信号线的两个部分的可动接触梁。 接地线形成有接触杆,其通过信号线的间隙,以形成接触梁和接地线之间的欧姆接触。 接触金属化至少在信号线和接地线的接触梁的顶部和侧壁上提供。