System for focus detection utilizing a photoelectric sensor array
    2.
    发明授权
    System for focus detection utilizing a photoelectric sensor array 失效
    利用光电传感器阵列进行焦点检测的系统

    公开(公告)号:US4368383A

    公开(公告)日:1983-01-11

    申请号:US294724

    申请日:1981-08-20

    IPC分类号: G03B3/10 G01J1/16 G03B3/00

    CPC分类号: G03B3/10

    摘要: A light measuring device capable of amplifying the difference of the time-sequential pulse output signals from the photoelectric sensor array regardless of the magnitude of said pulse output signals, comprises optical system means; means comprising a photoelectric sensor array having a plurality of photoelectric sensors for receiving the light passing through said optical system means and generating electric signals respectively corresponding to the intensity of light received by said photoelectric sensors as time-sequential signals of a determined interval; means for generating a comparison signal of a determined magnitude related to the output level of said electric signals; and processing means adapted to receive said electric signals and said comparison signal to generate output signals related to the difference of said signals in a sequential manner.

    摘要翻译: 能够放大来自光电传感器阵列的时序脉冲输出信号的差异而不管所述脉冲输出信号的幅度的光测量装置包括光学系统装置; 包括具有多个光电传感器的光电传感器阵列的装置,所述光电传感器用于接收通过所述光学系统装置的光,并且产生分别对应于由所述光电传感器接收的光的强度的电信号作为确定间隔的时间序列信号; 用于产生与所述电信号的输出电平有关的确定幅度的比较信号的装置; 以及适于接收所述电信号和所述比较信号的处理装置,以顺序方式产生与所述信号的差相关的输出信号。

    Light image space frequency component extracting device
    3.
    发明授权
    Light image space frequency component extracting device 失效
    光图像空间频率分量提取装置

    公开(公告)号:US4291224A

    公开(公告)日:1981-09-22

    申请号:US98153

    申请日:1979-11-28

    CPC分类号: G02B7/365 G02B27/40

    摘要: This invention discloses a device for extracting the space frequency component of an image formed by an optical system. The device comprises means having a photoelectric element array including a plurality of photoelectric elements on which said image is projected and time-sequentially generating, at a predetermined period, a pulse output having a magnitude corresponding to the intensity of light received by each of the photoelectric elements, means for successively storing the respective pulse outputs, means for converting each of the stored pulse outputs into an AC signal, and means for adding together the AC signals and producing the same.

    摘要翻译: 本发明公开了一种用于提取由光学系统形成的图像的空间频率分量的装置。 该装置包括具有光电元件阵列的装置,该光电元件阵列包括多个光电元件,在该多个光电元件上投影所述图像并且以预定周期时间顺序地产生具有对应于由光电 元件,用于连续存储各个脉冲输出的装置,用于将每个存储的脉冲输出转换为AC信号的装置,以及用于将AC信号相加并产生该装置的装置。

    Focus detecting apparatus
    4.
    发明授权
    Focus detecting apparatus 失效
    对焦检测装置

    公开(公告)号:US4336450A

    公开(公告)日:1982-06-22

    申请号:US112350

    申请日:1980-01-15

    IPC分类号: G02B7/34 G01J1/20

    CPC分类号: G02B7/34

    摘要: A focus detecting apparatus comprises first means for forming phase outputs from said first and second photosensor arrays of phases respectively corresponding to the relative positions of said first and second photosensor arrays with respect to the light images thereon; second means for comparing the output corresponding to the amount of light entering said first photosensor array with the output corresponding to the amount of light entering said second photosensor array and forming a correlation output corresponding to said comparison; third means for forming outputs corresponding to the sharpness of light images on said photosensor arrays from the outputs from said arrays; and processing means for generating a synthesized output signal representing the focus state of said objective lens with respect to the object from the aforementioned phase outputs, correlation output and sharpness outputs.

    摘要翻译: 焦点检测装置包括:第一装置,用于从相应于所述第一和第二光电传感器阵列相对于其上的光图像的相对位置的所述第一和第二光电传感器阵列形成相位输出; 第二装置,用于将与进入所述第一光电传感器阵列的光量相对应的输出与对应于进入所述第二光电传感器阵列的光量的输出进行比较,并形成对应于所述比较的相关输出; 第三装置,用于从所述阵列的输出形成对应于所述光传感器阵列上的光图像的清晰度的输出; 以及处理装置,用于根据上述相位输出,相关输出和锐度输出,产生表示所述物镜的聚焦状态的合成输出信号。

    Focus detecting device
    5.
    发明授权
    Focus detecting device 失效
    对焦检测装置

    公开(公告)号:US4297571A

    公开(公告)日:1981-10-27

    申请号:US109282

    申请日:1980-01-03

    IPC分类号: G03B13/36 G02B7/34 G01J1/20

    CPC分类号: G02B7/34

    摘要: In a focus detecting device having a first and second photoelectric element arrays each including a plurality of photo-electric elements disposed so as to mutually correspond in position and optical means for forming a first image and a second image of an object on the first and second arrays, respectively, there is provided first means for calculating the differences between electrical outputs related to the outputs of the mutually corresponding ones of the photoelectric elements of the first and second arrays and adding together the quantities based on said differences, second means for calculating the difference between each electrical output related to the output of each of the photoelectric elements and each electrical output related to the output of the photoelectric element spaced apart from each photoelectric element with a predetermined number of photoelectric elements interposed therebetween in the direction of arrangement of the elements of the arrays and adding together the quantities based on said differences, and third means for detecting the focused condition of the objective lens on the basis of the outputs of said first means and said second means.

    摘要翻译: 在具有第一和第二光电元件阵列的焦点检测装置中,每个光电元件阵列包括设置成在位置上相互对应的多个光电元件,以及用于形成第一和第二图像上的物体的第一图像和第二图像的光学装置 阵列分别提供了用于计算与第一和第二阵列的相互对应的光电元件的输出相关的电输出之间的差异的第一装置,并且基于所述差值将所述量相加在一起,第二装置用于计算 与每个光电元件的输出相关的每个电输出和与每个光电元件间隔开的光电元件的输出相关的每个电输出之间的差异与在其间插入的预定数量的光电元件沿元件的排列方向 的数组并加在一起 基于所述差异的量,以及用于基于所述第一装置和所述第二装置的输出来检测物镜的聚焦状态的第三装置。

    Device for extracting a plurality of space frequency components
    7.
    发明授权
    Device for extracting a plurality of space frequency components 失效
    用于提取多个空间频率分量的装置

    公开(公告)号:US4306143A

    公开(公告)日:1981-12-15

    申请号:US109281

    申请日:1980-01-03

    CPC分类号: G02B7/365

    摘要: A device for extracting a plurality of space frequency components from an optical image formed by an image forming optical system comprises a photoelectric element array including at least N photoelectric elements disposed in or near the image formation plane of the image forming optical system, and means for generating, on the basis of the output of each of the photoelectric elements of the array, an electrical output varying in phase in accordance with the displacement of the optical image in the direction of arrangement of the photoelectric elements.

    摘要翻译: 一种用于从由图像形成光学系统形成的光学图像提取多个空间频率分量的装置包括:光电元件阵列,其包括设置在图像形成光学系统的图像形成平面内或附近的至少N个光电元件,以及用于 基于阵列的每个光电元件的输出,产生根据光学图像在光电元件的布置方向上的位移而相位变化的电输出。

    Apparatus for detecting displacement of optical image
    8.
    发明授权
    Apparatus for detecting displacement of optical image 失效
    用于检测光学图像位移的装置

    公开(公告)号:US4339665A

    公开(公告)日:1982-07-13

    申请号:US123211

    申请日:1980-02-21

    CPC分类号: G02B7/36

    摘要: Apparatus for detecting displacement of optical image is disclosed which comprises a photosensitive element array, a first circuit, a second circuit and a phase difference measuring circuit. The photosensitive element array is composed of a number of photosensitive elements disposed on and near the focal plane of an image forming optical system through which an optical image is formed. The first circuit multiplies the electric outputs from photosensitive elements in the array by vectors whose phases sequentially increase or decrease, and then adds the products together to form an added output. The second circuit multiplies the electric outputs from photosensitive elements slightly shifted from the above elements in the same array, and then adds the products together to form a second added output. The difference in phase between the first and second added outputs is measured by the phase difference measuring circuit.

    摘要翻译: 公开了一种用于检测光学图像位移的装置,其包括光敏元件阵列,第一电路,第二电路和相位差测量电路。 感光元件阵列由设置在形成光学图像的图像形成光学系统的焦平面上和附近的许多感光元件组成。 第一个电路通过相位顺序增加或减小的矢量将阵列中的光敏元件的电输出相乘,然后将产品相加在一起形成一个附加的输出。 第二电路将来自与上述元件稍微偏移的光敏元件的电输出相乘在同一阵列中,然后将产品相加在一起形成第二个附加输出。 第一和第二相加输出之间的相位差由相位差测量电路测量。

    Focus detecting apparatus
    9.
    发明授权
    Focus detecting apparatus 失效
    对焦检测装置

    公开(公告)号:US4264810A

    公开(公告)日:1981-04-28

    申请号:US972261

    申请日:1978-12-22

    IPC分类号: G02B27/16 G02B27/40 G01S1/36

    CPC分类号: G02B27/40 G02B27/16

    摘要: Focus detecting apparatus for an optical system including first and second image forming optical means for forming the image of an object along first and second spatially separated light paths, first and second photosensitive element arrays each comprising a plurality of photosensitive elements and producing an electrical signal representative of the intensity distribution pattern of the light incident thereon, and circuit means for detecting the focus of the optical system in accordance with the electrical signals from the first and second arrays. The circuit means includes a first processing circuit, a second processing circuit and a phase comparing circuit. The first processing circuit produces an electrical output having a phase representative of the positional relation between the first array and the intensity distribution pattern of the light incident on the first array, in accordance with the electrical signal from the first array. The second processing circuit produces an electrical signal having a phase representative of the positional relation between the second array and the intensity distribution pattern of the light incident on the second array, in accordance with the electrical signal from the second array, and the phase comparing circuit compares the phases of the electrical outputs from the first and second processing circuits and produces an output signal representative of the focus position of the optical system.

    摘要翻译: 一种用于光学系统的聚焦检测装置,包括:第一和第二成像光学装置,用于沿着第一和第二空间分开的光路形成物体的图像;第一和第二光敏元件阵列,每个包括多个光敏元件,并产生电信号代表 入射到其上的光的强度分布图案,以及用于根据来自第一和第二阵列的电信号检测光学系统的焦点的电路装置。 电路装置包括第一处理电路,第二处理电路和相位比较电路。 第一处理电路根据来自第一阵列的电信号产生具有表示第一阵列与入射在第一阵列上的光的强度分布图案之间的位置关系的相位的电输出。 第二处理电路根据来自第二阵列的电信号产生具有表示第二阵列与入射在第二阵列上的光的强度分布图案之间的位置关系的相位的电信号,以及相位比较电路 比较来自第一和第二处理电路的电输出的相位,并产生表示光学系统的聚焦位置的输出信号。

    Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method
    10.
    发明授权
    Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method 有权
    放电灯,光源装置,曝光装置和曝光装置的制造方法

    公开(公告)号:US08704431B2

    公开(公告)日:2014-04-22

    申请号:US13462454

    申请日:2012-05-02

    IPC分类号: H01J61/52

    摘要: A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.

    摘要翻译: 光源装置配备有放电灯,其具有形成发光部的玻璃管和与其连接的基座部件,以及通过基座部件保持放电灯的安装装置。 其特征在于,所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。 此外,安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。