公开(公告)号：US20190064681A1

公开(公告)日：2019-02-28

申请号：US15743871

申请日：2017-08-31

申请人： HKC CORPORATION LIMITED ,  Chongqing HKC Optpelectronics Technology Co., Ltd.

发明人： Chun-bin WEN

IPC分类号： G03F7/20

CPC分类号： G03F7/70883 ,  G03F7/70016 ,  G03F7/70816 ,  G03F7/70916

摘要： Provided are an exposure apparatus and a prevention method and system for image offset of the exposure apparatus. The dust cover which is made of transparent material and arranged and arranged at one end of the bearing connected to the lifter enables to check whether the bearing is abraded via manual vision or machine vision, thereby enhancing the yield of the glass substrates achieved by photoetching in the photo process and thus improving the production efficiency of the photo process.

公开(公告)号：US10061197B2

公开(公告)日：2018-08-28

申请号：US15326207

申请日：2015-07-09

申请人： USHIO DENKI KABUSHIKI KAISHA

发明人： Tatsushi Owada ,  Shinji Suzuki

IPC分类号： H01J61/16 ,  G03F7/20 ,  H01L21/027 ,  H05B41/34 ,  H01J61/90 ,  G03F7/00 ,  G03F7/16 ,  H01S3/225

CPC分类号： G03F7/2004 ,  G03F7/0002 ,  G03F7/165 ,  G03F7/168 ,  G03F7/70016 ,  G03F7/70041 ,  G03F7/7015 ,  G03F7/7035 ,  G03F7/70466 ,  G03F7/70933 ,  H01J61/16 ,  H01J61/368 ,  H01J61/545 ,  H01J61/86 ,  H01J61/90 ,  H01L21/0274 ,  H01S3/225 ,  H01S3/2253 ,  H01S3/2255 ,  H05B41/34

摘要： Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.

公开(公告)号：US10057973B2

公开(公告)日：2018-08-21

申请号：US15409702

申请日：2017-01-19

申请人： Excelitas Technologies Corp.

发明人： Rudi Blondia

IPC分类号： H01J7/24 ,  H05H1/46 ,  H01J61/54 ,  H01J61/02 ,  H01J65/04 ,  G03F7/20

CPC分类号： H05H1/46 ,  G03F7/70008 ,  G03F7/70016 ,  G03F7/70025 ,  G03F7/70033 ,  G03F7/7005 ,  H01J61/025 ,  H01J61/16 ,  H01J61/30 ,  H01J61/54 ,  H01J65/04

摘要： An ignition facilitated electrodeless sealed high intensity illumination device is configured to receive a laser beam from a continuous wave (CW) laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber has an ingress window disposed within a wall of a chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, and a high intensity light egress window configured to emit high intensity light from the chamber. The CW laser beam is producible by a CW laser below 250 Watts configured to produce a wavelength below 1100 nm. The device is configured to focus the laser beam to a full width at half maximum (FWHM) beam waist of 1-15 microns2 and a Rayleigh length of 6 microns or less, and the plasma is configured to be ignited by the CW laser beam.

公开(公告)号：US09966245B2

公开(公告)日：2018-05-08

申请号：US14960583

申请日：2015-12-07

申请人： CANON KABUSHIKI KAISHA

发明人： Kentaro Hiruma ,  Manato Furusawa ,  Noboru Osaka

IPC分类号： G03F7/20 ,  H01J61/52 ,  G03F7/32 ,  H01J61/86

CPC分类号： H01J61/526 ,  G03F7/20 ,  G03F7/32 ,  G03F7/70016 ,  G03F7/70891 ,  H01J61/86

摘要： A cooling apparatus for cooling a light source unit is provided. The cooling apparatus includes a cooling unit provided outside a path of light from the light source unit, and a heat pipe configured to connect a heat generating portion of the light source unit and the cooling unit. The heat pipe also serves as an electrode wire of the light source unit.

公开(公告)号：US20100225232A1

公开(公告)日：2010-09-09

申请号：US12659323

申请日：2010-03-04

申请人： Taku Sumitomo ,  Toshio Yokota

发明人： Taku Sumitomo ,  Toshio Yokota

IPC分类号： H01J17/30

CPC分类号： H01J65/04 ,  G03F7/70016 ,  G03F7/70925

摘要： A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a work piece with light, one or more laser oscillator for emitting a laser beam to the discharge lamp, and a discharge starting unit for starting discharge. The method includes removing deposits adhering to an inner face of the discharge lamp by irradiating a discharge vessel with the laser beam from the first laser oscillator, starting discharge in the discharge vessel by the discharge starting unit, and condensing the laser beam from a second laser oscillator, into the discharge vessel.

摘要翻译： 一种点亮具有放电灯的光源装置，用于反射从放电灯发出的光的反射镜，用于用光照射工件的发光光学系统，用于发射激光的一个或多个激光振荡器的方法 放电灯和用于开始放电的放电启动单元。 该方法包括通过用来自第一激光振荡器的激光束照射放电容器来去除附着在放电灯内表面的沉积物，通过放电启动单元在放电容器中开始放电，并将来自第二激光器的激光束 振荡器，进入放电容器。

公开(公告)号：US20060227254A1

公开(公告)日：2006-10-12

申请号：US11401294

申请日：2006-04-11

申请人： Koichi Kato ,  Yoshitaka Sato

发明人： Koichi Kato ,  Yoshitaka Sato

IPC分类号： H04N5/64

CPC分类号： F21V29/70 ,  F21S41/17 ,  F21S41/192 ,  F21S45/47 ,  F21S45/48 ,  F21V23/026 ,  F21V29/74 ,  F21V29/85 ,  G03F7/70016 ,  H01L2924/19105 ,  H01L2924/19107 ,  H05B41/02 ,  H05B41/042 ,  H05B41/2881 ,  H05K1/0206 ,  H05K1/0209 ,  H05K3/0061 ,  H05K3/305 ,  H05K2201/0209 ,  H05K2201/0959 ,  H05K2201/09781 ,  H05K2201/1003 ,  H05K2201/10446

摘要： A discharge lamp lighting apparatus includes a transformer unit, a casing for housing the transformer unit, and a circuit board including circuit components. In the casing, the circuit board is joined to the casing and the transformer unit is fixed to the circuit board through a heat conductive member having thermal conductivity of more than 0.1 W/(m·k). Heat produced by the transformer unit is transferred to the casing through the heat conductive member and released through the casing effectively. In the lighting apparatus, therefore, while the transformer unit is arranged relatively close to the circuit components, the heat can be prevented from affecting the circuit components.

公开(公告)号：US07063583B2

公开(公告)日：2006-06-20

申请号：US09815678

申请日：2001-03-23

申请人： Woo Sik Yoo

发明人： Woo Sik Yoo

IPC分类号： H01J9/395

CPC分类号： G03F7/70016 ,  H01J9/395 ,  H01J61/00 ,  H01J61/12 ,  H01J61/16 ,  H01J61/28 ,  H01J61/305 ,  H01J61/307 ,  H01J61/32 ,  H01J61/322 ,  H01J61/327 ,  H01J61/38

摘要： A multi-spectral uniform light source provides a single light source for a variety of applications. The gas or gases inside the light source may be exchanged for another gas or gases depending on the desired application and need for a particular wavelength of emitted light.

公开(公告)号：US20050269934A1

公开(公告)日：2005-12-08

申请号：US10860655

申请日：2004-06-04

申请人： Koenraad S. S. Salden

发明人： Koenraad S. S. Salden

IPC分类号： F21V15/00 ,  B65D85/42 ,  F21V25/12 ,  F21Y101/00 ,  G03F7/20 ,  H01J61/50 ,  H01L21/027 ,  H01K1/26

CPC分类号： G03F7/70983 ,  G03F7/70016 ,  G03F7/70975

摘要： A protective cover for a lamp is flexible and made of a material that has a tensile strength so that the protective cover is impermeable to fragments produced from the lamp when the lamp breaks when covered by the protective cover. The protective cover is used to install the discharge lamp in a source and removed from the lamp after installing the lamp.

摘要翻译： 灯的保护盖是柔性的，并且由具有拉伸强度的材料制成，使得当灯被保护盖覆盖时，保护盖不能透过灯产生的碎片。 保护盖用于将放电灯安装在源中，并在安装灯泡后从灯泡中取出。

公开(公告)号：US06810299B2

公开(公告)日：2004-10-26

申请号：US10044937

申请日：2002-01-15

申请人： Gen Nakamura

发明人： Gen Nakamura

IPC分类号： G06F1900

CPC分类号： G03F7/70016 ,  G03F7/70141 ,  G03F7/70175 ,  G03F7/70858 ,  G03F7/709 ,  G03F7/70991

摘要： A semiconductor manufacturing apparatus includes a light source and a lighting device that lights the light the light source A connector connects the light source and the lighting device with a metal piece to provide control of generation of noise accompanying increased electrical power supplied to the lamp and control of the space required for installation in a single housing having outer walls with electromagnetic shielding. Temperature of the light source and the lighting device is adjusted using air of the ambient atmosphere from outside the housing.

摘要翻译： 半导体制造装置包括光源和点亮光源的照明装置。 连接器通过金属片连接光源和照明装置，以提供伴随提供给灯的增加的电力的噪声产生的控制，并且控制安装在具有电磁屏蔽的外壁的单个壳体中所需的空间。 光源和照明装置的温度使用外部空气从室外调节。

公开(公告)号：US20040017686A1

公开(公告)日：2004-01-29

申请号：US10270367

申请日：2002-10-15

申请人： COEMAR S.p.A.

发明人： Bruno Dedoro

IPC分类号： B60Q001/06

CPC分类号： F21V29/67 ,  F21S10/02 ,  F21V29/02 ,  F21V29/677 ,  F21W2131/406 ,  G03B21/2026 ,  G03F7/70016

摘要： A lighting unit with discharge lamps, particularly for spotlights and the like, comprising a discharge lamp inside a containment enclosure and ventilation elements for cooling the lamp, a control unit that drives a lamp power supply to supply variable power levels to the lamp and a fan power supply for actuating the ventilation elements at a variable speed. The control unit is controlled by signals imparted from outside and/or by signals that can be derived from measurements taken inside the lighting unit.

摘要翻译： 具有放电灯的照明单元，特别是用于聚光灯等的灯具，包括在容纳外壳内的放电灯和用于冷却灯的通风元件;驱动灯电源以向灯提供可变功率水平的控制单元和风扇 用于以可变速度致动通风元件的电源。 控制单元由来自外部的信号和/或由可从照明单元内进行测量得出的信号控制。