PIEZOELECTRIC RESONATOR, MANUFACTURING METHOD THEREOF AND LID FOR PIEZOELECTRIC RESONATOR
    2.
    发明申请
    PIEZOELECTRIC RESONATOR, MANUFACTURING METHOD THEREOF AND LID FOR PIEZOELECTRIC RESONATOR 失效
    压电谐振器及其制造方法及其用于压电谐振器

    公开(公告)号:US20080315727A1

    公开(公告)日:2008-12-25

    申请号:US12141187

    申请日:2008-06-18

    IPC分类号: H01L41/00 H01L41/22

    摘要: A piezoelectric resonator includes a piezoelectric resonator element having a resonating arm and a metal film that is formed on the resonating arm; a package including a bottom part on which the piezoelectric resonator element is fixed and a frame wall that surrounds the bottom part, and having an opening above the bottom part; and a lid including a frame in which a through hole is provided and an optically transparent part that has an upper face and a lower face of the frame and is disposed at the through hole, the through hole penetrating a front face and a back face, the lower face of the optically transparent part being disposed so as to oppose the metal film, and the lid closing the opening of the package such that the lid overlaps with the bottom part and the frame wall, the through hole having a curved inner wall face whose curved face is coupled with at least one of the front face and the back face at least one opening edge of the front face and the back face and a vertical inner wall face that is provided vertical to the front face and the back face and in a part of a thickness direction of the frame, and the optically transparent part being provided so as to contact closely with at least a part of the vertical inner wall face and at least a part of the curved inner wall face.

    摘要翻译: 压电谐振器包括具有谐振臂和形成在谐振臂上的金属膜的压电谐振元件; 包括固定有压电谐振元件的底部和围绕底部的框架壁,并且在底部上方具有开口的封装; 以及盖,其包括设置有通孔的框架和具有框架的上表面和下表面并设置在通孔的光学透明部分,所述通孔穿透前表面和后表面, 光学透明部分的下表面被设置为与金属膜相对,并且盖关闭包装的开口,使得盖子与底部部分和框架壁重叠,该通孔具有弯曲的内壁面 其曲面与前表面和后表面中的至少一个前表面和后表面的至少一个开口边缘和垂直于前表面和后表面设置的垂直内壁面相连接, 框架的厚度方向的一部分,并且光学透明部分设置成与垂直内壁面的至少一部分和弯曲的内壁面的至少一部分紧密接触。

    Piezoelectric resonator and manufacturing method therefor
    3.
    发明授权
    Piezoelectric resonator and manufacturing method therefor 失效
    压电谐振器及其制造方法

    公开(公告)号:US07714484B2

    公开(公告)日:2010-05-11

    申请号:US12143966

    申请日:2008-06-23

    IPC分类号: H01L41/08

    摘要: A piezoelectric resonator includes a piezoelectric resonator element having a base portion and a resonating arm extending from the base portion, a package including a bottom to which the piezoelectric resonator element is fixed and a frame wall that surrounds the bottom and having an opening above the bottom, and a lid for closing the opening of the package. In this piezoelectric resonator, the lid includes a main body having a through-hole formed therein, a flange formed to surround a periphery of the main body and to be thinner than the main body, and an optically transparent member located in the through-hole. The flange has a joining portion with an upper end surface of the frame wall, and the main body projects in a direction from the flange to the bottom in a thickness direction. Also, the through-hole is at a position displaced in a first direction approaching a first end of the main body from a center of the main body. Also, the flange is joined with the frame wall such that a clearance between the first end and the joining portion of the flange nearest to the first end is larger than a clearance between a second end in a second direction opposite to the first direction of the main body and the joining portion of the flange nearest to the second end.

    摘要翻译: 压电谐振器包括压电谐振元件,其具有基部和从基部延伸的谐振臂,包括固定有压电谐振元件的底部的封装和围绕底部并且在底部上方具有开口的框架壁 ,以及用于封闭包装的开口的盖子。 在该压电谐振器中,盖包括:主体,其中形成有通孔,形成为围绕主体的周边并且比主体更薄的凸缘,以及位于通孔中的光学透明构件 。 凸缘具有与框架壁的上端表面相连的接合部分,并且主体在厚度方向上从法兰到底部的方向突出。 此外,通孔位于从主体的中心接近主体的第一端的第一方向位移。 此外,凸缘与框架壁接合,使得最靠近第一端的凸缘的第一端和接合部之间的间隙大于在与第一端相反的第二方向上的第二端之间的间隙 主体和最接近第二端的凸缘的接合部分。

    Piezoelectric resonator, manufacturing method thereof and lid for piezoelectric resonator
    4.
    发明授权
    Piezoelectric resonator, manufacturing method thereof and lid for piezoelectric resonator 失效
    压电谐振器及其压电谐振器的制造方法和盖子

    公开(公告)号:US07859172B2

    公开(公告)日:2010-12-28

    申请号:US12141187

    申请日:2008-06-18

    IPC分类号: H01L41/08 H01L41/053

    摘要: A piezoelectric resonator includes a piezoelectric resonator element having a resonating arm and a metal film that is formed on the resonating arm; a package including a bottom part on which the piezoelectric resonator element is fixed and a frame wall that surrounds the bottom part, and having an opening above the bottom part; and a lid including a frame in which a through hole is provided and an optically transparent part that has an upper face and a lower face of the frame and is disposed at the through hole, the through hole penetrating a front face and a back face, the lower face of the optically transparent part being disposed so as to oppose the metal film, and the lid closing the opening of the package such that the lid overlaps with the bottom part and the frame wall, the through hole having a curved inner wall face whose curved face is coupled with at least one of the front face and the back face at least one opening edge of the front face and the back face and a vertical inner wall face that is provided vertical to the front face and the back face and in a part of a thickness direction of the frame, and the optically transparent part being provided so as to contact closely with at least a part of the vertical inner wall face and at least a part of the curved inner wall face.

    摘要翻译: 压电谐振器包括具有谐振臂和形成在谐振臂上的金属膜的压电谐振元件; 包括固定有压电谐振元件的底部和围绕底部的框架壁,并且在底部上方具有开口的封装; 以及盖,其包括设置有通孔的框架和具有框架的上表面和下表面并设置在通孔的光学透明部分,所述通孔穿透前表面和后表面, 光学透明部分的下表面被设置为与金属膜相对,并且盖关闭包装的开口,使得盖子与底部部分和框架壁重叠,该通孔具有弯曲的内壁面 其曲面与前表面和后表面中的至少一个前表面和后表面的至少一个开口边缘和垂直于前表面和后表面设置的垂直内壁面相连接, 框架的厚度方向的一部分,并且光学透明部分设置成与垂直内壁面的至少一部分和弯曲的内壁面的至少一部分紧密接触。