公开(公告)号：US20230299733A1

公开(公告)日：2023-09-21

申请号：US18185577

申请日：2023-03-17

Applicant: Akoustis, Inc.

Inventor： Abhay Saranswarup Kochhar ,  Dae Ho Kim ,  Zhiqiang Bi ,  Emad Mehdizadeh ,  Mojtaba Hodjat-Shamami ,  Mary Winters ,  Rohan Houlden ,  Jeffrey B. Shealy

IPC: H03H3/02

CPC classification number: H03H3/02

Abstract: A piezoelectric resonator device can be formed to include a piezoelectric film including an active area configured to provide a thickness excited mode of vibration, a first electrode on a first surface of the piezoelectric film positioned to electromechanically couple to the active area, a second electrode on a second surface of the piezoelectric film, opposite the first surface, the second electrode positioned to electromechanically couple to the active area, an energy confinement frame extending on the piezoelectric film embedded in the first or second electrode, an inner side wall of the energy confinement frame facing toward the active area and extending around the active area to define a perimeter that separates the active area located inside the perimeter from an outer area located outside the perimeter adjacent to the active area, an outer side wall of the energy confinement frame facing toward the outer area and aligned to an outer side wall of the first or second electrode and a conformal low-impedance acoustic layer extending on the active area over the energy confinement frame to cover the outer side wall of the energy confinement frame, and onto the piezoelectric film in the outer area.