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公开(公告)号:US07542134B2
公开(公告)日:2009-06-02
申请号:US12131909
申请日:2008-06-02
申请人: Aleksander Owczarz , Jaroslaw W. Winniczek , Luai Nasser , Alan Schoepp , Fred C. Redeker , Erik Edelberg
发明人: Aleksander Owczarz , Jaroslaw W. Winniczek , Luai Nasser , Alan Schoepp , Fred C. Redeker , Erik Edelberg
IPC分类号: G01N21/00
CPC分类号: G01N21/9501 , G01N2021/8822
摘要: A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle β relative to the first surface of the substrate. A method for inspecting a substrate is also included.
摘要翻译: 用于检查基板的系统包括照相机和光源。 相机朝向视场。 该视场包括该基板的第一表面的至少第一部分。 光源相对于衬底的第一表面以第一角度β朝向视场定向。 也包括检查基板的方法。
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公开(公告)号:US20080273195A1
公开(公告)日:2008-11-06
申请号:US12131909
申请日:2008-06-02
申请人: Aleksander Owczarz , Jaroslaw W. Winniczek , Luai Nasser , Alan Schoepp , Fred C. Redeker , Erik Edelberg
发明人: Aleksander Owczarz , Jaroslaw W. Winniczek , Luai Nasser , Alan Schoepp , Fred C. Redeker , Erik Edelberg
CPC分类号: G01N21/9501 , G01N2021/8822
摘要: A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle β relative to the first surface of the substrate. A method for inspecting a substrate is also included.
摘要翻译: 用于检查基板的系统包括照相机和光源。 相机朝向视场。 该视场包括该基板的第一表面的至少第一部分。 光源相对于衬底的第一表面以第一角度β朝向视场定向。 也包括检查基板的方法。
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公开(公告)号:US07397555B2
公开(公告)日:2008-07-08
申请号:US11016022
申请日:2004-12-17
申请人: Aleksander Owczarz , Jaroslaw W. Winniczek , Luai Nasser , Alan Schoepp , Fred C. Redeker , Erik Edelberg
发明人: Aleksander Owczarz , Jaroslaw W. Winniczek , Luai Nasser , Alan Schoepp , Fred C. Redeker , Erik Edelberg
IPC分类号: G01N21/00
CPC分类号: G01N21/9501 , G01N2021/8822
摘要: A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle β relative to the first surface of the substrate. A method for inspecting a substrate is also included.
摘要翻译: 用于检查基板的系统包括照相机和光源。 相机朝向视场。 该视场包括该基板的第一表面的至少第一部分。 光源相对于衬底的第一表面以第一角度β朝向视场定向。 也包括检查基板的方法。
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公开(公告)号:US20060139450A1
公开(公告)日:2006-06-29
申请号:US11016022
申请日:2004-12-17
申请人: Aleksander Owczarz , Jaroslaw Winniczek , Luai Nasser , Alan Schoepp , Fred Redeker , Erik Edelberg
发明人: Aleksander Owczarz , Jaroslaw Winniczek , Luai Nasser , Alan Schoepp , Fred Redeker , Erik Edelberg
CPC分类号: G01N21/9501 , G01N2021/8822
摘要: A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle β relative to the first surface of the substrate. A method for inspecting a substrate is also included.
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