公开(公告)号：US12072351B1

公开(公告)日：2024-08-27

申请号：US16954000

申请日：2020-11-20

申请人： Alexander A. Ukhanov ,  Gennady A Smolyakov ,  Fei Hung Chu

发明人： Alexander A. Ukhanov ,  Gennady A Smolyakov ,  Fei Hung Chu

IPC分类号： G01Q60/06 ,  C12Q1/6869 ,  G01N21/65 ,  H01S5/06 ,  H01S5/34 ,  H01S5/343

CPC分类号： G01Q60/06 ,  C12Q1/6869 ,  G01N21/65 ,  H01S5/0601 ,  H01S5/3402 ,  H01S5/343

摘要： A new integrated III-V/silicon Atomic Force Microscopy (AFM) active optical probe integrates a III-V semiconductor laser source and a silicon cantilever AFM probe into a robust easy-to-use single III-V/silicon chip to enable AFM measurements, optical imaging, and spectroscopy at the nanoscale.

公开(公告)号：US11016119B1

公开(公告)日：2021-05-25

申请号：US15484747

申请日：2017-04-11

申请人： Alexander A. Ukhanov ,  Gennady A. Smolyakov ,  Fei Hung Chu ,  Chengao Wang

发明人： Alexander A. Ukhanov ,  Gennady A. Smolyakov ,  Fei Hung Chu ,  Chengao Wang

IPC分类号： G01Q60/38

摘要： A new monolithic Atomic Force Microscopy (AFM) active optical probe monolithically integrates a base of the probe, a cantilever, a semiconductor laser source, an AFM tip, and a photodetector into a robust, easy-to-use single semiconductor chip to enable AFM measurements, optical imaging, and optical spectroscopy at the nanoscale.