公开(公告)号：US20070205142A1

公开(公告)日：2007-09-06

申请号：US11547668

申请日：2005-09-09

申请人： Alexander Parfitt ,  Ian Sturland ,  Clyde Warsop ,  Paul Dawson

发明人： Alexander Parfitt ,  Ian Sturland ,  Clyde Warsop ,  Paul Dawson

IPC分类号： B03B9/00

CPC分类号： B01D46/12 ,  G01N1/2208 ,  G01N1/2273 ,  G01N15/0255 ,  G01N2001/2223

摘要： A separator is disclosed for separating particles of at least first and second mass/size ranges from an ambient fluid (e.g. gaseous) medium in which they are present, particles of the first range being of generally larger size/mass than particles of the second range. The separator is especially designed for use in an air monitoring device which is designed for rapid detection of micro-organisms such as bacteria, viruses, pathogens and the like, and is designed to be portable so that it can be readily and rapidly deployed in both civilian and military environments and can be used indoors and outdoors; it can also be designed for personal use.

摘要翻译： 公开了用于从其存在的环境流体（例如气体）介质中分离至少第一和第二质量/尺寸范围的颗粒的分离器，第一范围的颗粒通常具有比第二范围的颗粒大的尺寸/质量 。 分离器特别设计用于空气监测装置，其被设计用于微生物如细菌，病毒，病原体等的快速检测，并且被设计为便携式，使得其可以容易地并快速地部署在两者中 民用和军事环境，可在室内外使用; 它也可以设计为个人使用。

公开(公告)号：US20060162431A1

公开(公告)日：2006-07-27

申请号：US10529056

申请日：2003-09-30

申请人： Steven Harris ,  Michael Hebbron ,  Ian Sturland

发明人： Steven Harris ,  Michael Hebbron ,  Ian Sturland

IPC分类号： G01N17/00

CPC分类号： G01N17/043 ,  G01N17/006

摘要： A microsensor for detecting corrosive media acting on a bulk metallic material when mounted in situ adjacent a location in the bulk metallic material. The microsensor includes a plurality of corrosion sensors (4A, 4B, 4C) exposed to the corrosive media, each having corrosive tracks formed from a patterned conductive thin film. The different sensors have different characteristics, such as track width, track thickness, track composition, surface type, sensor type, etc. so as to provide the sensors with different sensitivities, corrosion indications and lifetime characteristics. Such microsensor arrangements provide improved corrosion detection at high degrees of miniaturisation.

摘要翻译： 一种用于检测作用在大块金属材料上的腐蚀性介质的微传感器，当安装在本体金属材料中的位置附近。 微传感器包括暴露于腐蚀性介质的多个腐蚀传感器（4A，4B，4C），每个具有由图案化导电薄膜形成的腐蚀性轨道。 不同的传感器具有不同的特性，例如轨道宽度，轨道厚度，轨道组成，表面类型，传感器类型等，以便为传感器提供不同的灵敏度，腐蚀指示和寿命特性。 这种微传感器布置在高度小型化的情况下提供了改进的腐蚀检测。

公开(公告)号：US07637156B2

公开(公告)日：2009-12-29

申请号：US11571974

申请日：2005-07-12

申请人： Ryuta Araki ,  Osamu Torayashiki ,  Toru Kitamura ,  Hiroshi Kawasaki ,  Tsuyoshi Takemoto ,  Koji Nakamura ,  Christopher P. Fell ,  Kevin Townsend ,  Ian Sturland

发明人： Ryuta Araki ,  Osamu Torayashiki ,  Toru Kitamura ,  Hiroshi Kawasaki ,  Tsuyoshi Takemoto ,  Koji Nakamura ,  Christopher P. Fell ,  Kevin Townsend ,  Ian Sturland

IPC分类号： G01P9/04

CPC分类号： G01C19/5684

摘要： A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.

摘要翻译： 通过MEMS技术形成在硅晶片1中的振动器10具有支撑在中心部分11处并在径向方向上延伸并且相互保持相同角度的八个梁部分（梁）12，并且具有环形部分13 连接到八个光束部分12.在环部分13的外部，用于静电致动，电容检测等的八个电极21a至21h与在环部分13和电极21a至21h之间产生的间隙22均匀地间隔开。 在环部13内部，用于频率调节的十六个电极23与在环部13和电极23之间形成的间隙24均匀地间隔开。

公开(公告)号：US20060002815A1

公开(公告)日：2006-01-05

申请号：US10529227

申请日：2003-10-01

申请人： Steven Harris ,  Michael Hebbron ,  Ian Sturland

发明人： Steven Harris ,  Michael Hebbron ,  Ian Sturland

IPC分类号： G01N17/00

CPC分类号： G01N17/006 ,  G01N17/02 ,  G01N17/043

摘要： A microsensor for detecting corrosive media acting on a bulk metallic material when mounted in situ adjacent a location in the bulk metallic material. The microsensor includes a plurality of corrosive tracks (16; 132; 216B) exposed to the corrosive media, each said corrosive track being formed as a patterned conductive thin film track. The tracks follow serpentine paths which include a plurality of bends, at least two of which are of opposite curvature, to provide a high degree of miniaturisation coupled with accurate and reliable corrosion sensing characteristics. The corrosive tracks may be formed from an alloy material, such as an aluminium alloy, to mimic the corrosive characteristics of a bulk metallic alloy and to provide improved corrosion detection for components made from such materials at high degrees of miniaturisation.

摘要翻译： 一种用于检测作用在大块金属材料上的腐蚀性介质的微传感器，当安装在本体金属材料中的位置附近。 微传感器包括暴露于腐蚀介质的多个腐蚀性轨道（16; 132; 216B），每个所述腐蚀性轨迹形成为图案化的导电薄膜轨道。 轨道跟随蛇形路径，其包括多个弯曲部，其中至少两个弯曲部分具有相反的曲率，以提供高度的小型化以及准确可靠的腐蚀感测特性。 腐蚀性轨道可以由诸如铝合金的合金材料形成，以模拟体金属合金的腐蚀特性，并且在高度小型化的情况下为由这些材料制成的部件提供改进的腐蚀检测。

公开(公告)号：US06471883B1

公开(公告)日：2002-10-29

申请号：US09468838

申请日：1999-12-22

申请人： Christopher P Fell ,  Kevin Townsend ,  Ian Sturland

发明人： Christopher P Fell ,  Kevin Townsend ,  Ian Sturland

IPC分类号： G01C1956

CPC分类号： G01C19/5684

摘要： A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

摘要翻译： 具有硅基本上平面的环形振动结构（1）的振动结构陀螺仪（1）用于赋予振动结构（1）的驱动运动和感测振动结构（1）运动的电容性装置，以及围绕电容装置的屏蔽层（15），通过沉积光致抗蚀剂材料 （9）上的玻璃或硅衬底（7）上，硬化，图案化和显影所述光致抗蚀剂（9）以暴露所述衬底（7）的区域，蚀刻所述暴露的区域以在其中形成空腔（10），剥离任何剩余的光致抗蚀剂材料 （9）将硅层（8）附着到所述空化衬底（7）上，在所述硅层（8）上沉积铝层，在所述铝层上沉积光致抗蚀剂材料，硬化，图案化和显影所述光致抗蚀剂层以暴露 铝层，蚀刻铝层的暴露区域以在硅层上留下铝的区域，提供接合焊盘（11,12,13和14），从其中剥离剩余的光致抗蚀剂 光致抗蚀剂材料沉积在剩余的沉积铝层区域上的硅层（8）上的另一层光致抗蚀剂材料，硬化，图案化和显影该光致抗蚀剂材料层以暴露硅层（8）的区域和深反应离子蚀刻 所述硅层（8）的暴露区域从其形成由所述空腔（10）上方的毂（4）安装的所述基本上平面的环形振动结构（1）。

公开(公告)号：US20070220972A1

公开(公告)日：2007-09-27

申请号：US11571974

申请日：2005-07-12

申请人： Ryuta Araki ,  Osamu Torayashiki ,  Toru Kitamura ,  Hiroshi Kawasaki ,  Tsuyoshi Takemoto ,  Koji Nakamura ,  Christopher Fell ,  Kevin Townsend ,  Ian Sturland

发明人： Ryuta Araki ,  Osamu Torayashiki ,  Toru Kitamura ,  Hiroshi Kawasaki ,  Tsuyoshi Takemoto ,  Koji Nakamura ,  Christopher Fell ,  Kevin Townsend ,  Ian Sturland

IPC分类号： G01P3/44

CPC分类号： G01C19/5684

摘要： A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.

摘要翻译： 通过MEMS技术形成在硅晶片1中的振动器10具有支撑在中心部分11处并在径向方向上延伸并且相互保持相同角度的八个梁部分（梁）12，并且具有环形部分13 连接到八个光束部分12。 在环形部分13的外部，用于静电驱动，电容检测等的八个电极21a至21h与在环部13和电极21a至21h之间产生的间隙22均匀地间隔开。 在环部13内部，用于频率调节的十六个电极23与在环部13和电极23之间形成的间隙24均匀地间隔开。