公开(公告)号：US06471883B1

公开(公告)日：2002-10-29

申请号：US09468838

申请日：1999-12-22

申请人： Christopher P Fell ,  Kevin Townsend ,  Ian Sturland

发明人： Christopher P Fell ,  Kevin Townsend ,  Ian Sturland

IPC分类号： G01C1956

CPC分类号： G01C19/5684

摘要： A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

摘要翻译： 具有硅基本上平面的环形振动结构（1）的振动结构陀螺仪（1）用于赋予振动结构（1）的驱动运动和感测振动结构（1）运动的电容性装置，以及围绕电容装置的屏蔽层（15），通过沉积光致抗蚀剂材料 （9）上的玻璃或硅衬底（7）上，硬化，图案化和显影所述光致抗蚀剂（9）以暴露所述衬底（7）的区域，蚀刻所述暴露的区域以在其中形成空腔（10），剥离任何剩余的光致抗蚀剂材料 （9）将硅层（8）附着到所述空化衬底（7）上，在所述硅层（8）上沉积铝层，在所述铝层上沉积光致抗蚀剂材料，硬化，图案化和显影所述光致抗蚀剂层以暴露 铝层，蚀刻铝层的暴露区域以在硅层上留下铝的区域，提供接合焊盘（11,12,13和14），从其中剥离剩余的光致抗蚀剂 光致抗蚀剂材料沉积在剩余的沉积铝层区域上的硅层（8）上的另一层光致抗蚀剂材料，硬化，图案化和显影该光致抗蚀剂材料层以暴露硅层（8）的区域和深反应离子蚀刻 所述硅层（8）的暴露区域从其形成由所述空腔（10）上方的毂（4）安装的所述基本上平面的环形振动结构（1）。

公开(公告)号：US07637156B2

公开(公告)日：2009-12-29

申请号：US11571974

申请日：2005-07-12

申请人： Ryuta Araki ,  Osamu Torayashiki ,  Toru Kitamura ,  Hiroshi Kawasaki ,  Tsuyoshi Takemoto ,  Koji Nakamura ,  Christopher P. Fell ,  Kevin Townsend ,  Ian Sturland

发明人： Ryuta Araki ,  Osamu Torayashiki ,  Toru Kitamura ,  Hiroshi Kawasaki ,  Tsuyoshi Takemoto ,  Koji Nakamura ,  Christopher P. Fell ,  Kevin Townsend ,  Ian Sturland

IPC分类号： G01P9/04

CPC分类号： G01C19/5684

摘要： A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.

摘要翻译： 通过MEMS技术形成在硅晶片1中的振动器10具有支撑在中心部分11处并在径向方向上延伸并且相互保持相同角度的八个梁部分（梁）12，并且具有环形部分13 连接到八个光束部分12.在环部分13的外部，用于静电致动，电容检测等的八个电极21a至21h与在环部分13和电极21a至21h之间产生的间隙22均匀地间隔开。 在环部13内部，用于频率调节的十六个电极23与在环部13和电极23之间形成的间隙24均匀地间隔开。

公开(公告)号：US06978674B2

公开(公告)日：2005-12-27

申请号：US10475015

申请日：2002-09-06

申请人： Christopher P Fell ,  Rebecka Eley ,  Colin H. J. Fox ,  Stewart McWilliam

发明人： Christopher P Fell ,  Rebecka Eley ,  Colin H. J. Fox ,  Stewart McWilliam

IPC分类号： G01C19/5677 ,  G01P9/04

CPC分类号： G01C19/5677

摘要： A two axis gyroscope including a substantially planar vibratory resonator (5) having a substantially ring or hoop-like structure with inner and other peripheries extending around a common axis, carrier mode drive (22) for causing the resonator (5) to vibrate in a cosnθ vibration mode, carrier mode pick-off (23) for sensing movement of the resonator (5) in response to the carrier mode drive (22), X-axis response mode pick-off (25) for detecting movement of the resonator in response to rotation about the X-axis, X-axis response mode drive (24) for nulling said motion, y-axis response mode pick-off (27) for detecting movement of the resonator in response to rotation about the y-axis, y-axis response mode drive (26) for nulling said motion, and a support (9) for flexibly supporting the resonator (5) and for allowing the resonator to vibrate relative to the support (9) in response to the carrier mode drive (22) and to applied rotation, wherein the support (9) comprises only L legs, where, when L is even: L=2N/K, and where, when L is odd: L=N/K where K is an integer, L>2 and N is the carrier mode order.

摘要翻译： 一种双轴陀螺仪，包括具有基本上环形或环状结构的基本上平面的振动谐振器（5），其具有围绕公共轴线延伸的内部和其它周边;载体模式驱动器（22），用于使谐振器（5）振动 谐振器振动模式，用于响应于载波模式驱动（22）感测谐振器（5）的移动的载波模式拾取（23），用于检测谐振器的移动的X轴响应模式拾取（25） 响应围绕X轴旋转的X轴响应模式驱动（24），用于使所述运动置零，用于响应于围绕y轴的旋转检测谐振器的运动的y轴响应模式拾取（27） 用于使所述运动归零的y轴响应模式驱动器（26）和用于灵活地支撑谐振器（5）并且用于允许谐振器响应于载波模式驱动而相对于支撑件（9）振动的支撑件（9） 22）并施加旋转，其中支撑件（9） ）仅包括L个支路，其中当L为偶数时：<？in-line-formula description =“In-line Formulas”end =“lead”？> L = 2N / K和<？in-line-formula description =“直线公式”end =“tail”？>其中，当L为奇数时：<？in-line-formula description =“In-line Formulas”end =“lead”？> L = N / K < in-line-formula description =“In-line Formulas”end =“tail”？>其中K是整数，L> 2，N是载体模式顺序。

公开(公告)号：US5739410A

公开(公告)日：1998-04-14

申请号：US763348

申请日：1996-12-11

申请人： Christopher P. Fell

发明人： Christopher P. Fell

IPC分类号： G01C19/5691 ,  G01C19/56

CPC分类号： G01C19/5691

摘要： Vibration mode frequencies of a vibrating structure gyroscope sensing element are matched by removing and/or adding a desired variable amount of material from or to the sensing element (1) at at least one point (4) on or in the vicinity of the neutral axis (5).

摘要翻译： 振动结构陀螺仪感应元件的振动模式频率通过在中性轴线上或附近的至少一点（4）处去除和/或添加来自感测元件（1）的感测元件（1）或/ （5）。

公开(公告)号：US06651499B2

公开(公告)日：2003-11-25

申请号：US10221777

申请日：2002-09-17

申请人： Christopher P Fell ,  Kevin Townsend

发明人： Christopher P Fell ,  Kevin Townsend

IPC分类号： G01C1900

CPC分类号： G01C19/567

摘要： A vibrating structure gyroscope having a vibrating structure (3) primary drive means (4) and secondary drive means (7) and primary pick-off means (2) an secondary pick-off means (6) is provided with a control system. The control system includes a primary closed control loop (1) for controllably varying the drive signal applied to the primary drive means (4), a secondary closed control loop (5) for controllably varying the drive signal applied to the secondary drive means (7) in order to maintain a null value of the secondary pick-off means (6) and means (30) for actively adjusting the scalefactor in the primary and secondary closed control loops (1, 5). The means (30) includes means (34) for dividing a rate response signal from the loop (5) by a signal indicative of the amplitude of the primary mode vibration. The output form the means (34) is filtered to provide an applied rate output. A variable scalefactor loop (3) uses the output from the means (34) actively to adjust a reference voltage set level of loop (1) to adjust the in loop scalefactor of the system.

摘要翻译： 具有振动结构（3）的振动结构陀螺仪具有主驱动装置（4）和辅助驱动装置（7）以及辅助拾取装置（2），辅助输送装置（6）设置有控制系统。 控制系统包括用于可控地改变施加到主驱动装置（4）的驱动信号的主闭合控制回路（1），用于可控地改变施加到次驱动装置（7）的驱动信号的次闭合控制回路（5） ），以便保持次级拾取装置（6）的零值和用于主动调节主和次级闭合控制回路（1,5）中的比例因子的装置（30）。 装置（30）包括用于将来自环路（5）的速率响应信号除以指示主模式振动幅度的信号的装置（34）。 过滤装置（34）的输出以提供施加的速率输出。 可变比例因子环（3）主动地使用装置（34）的输出来调整环路（1）的参考电压设置电平以调整系统的环路比例因子。

公开(公告)号：US06883374B2

公开(公告)日：2005-04-26

申请号：US10475580

申请日：2002-09-06

申请人： Christopher P Fell ,  Rebecka Eley ,  Colin H. J. Fox ,  Stewart McWilliam

发明人： Christopher P Fell ,  Rebecka Eley ,  Colin H. J. Fox ,  Stewart McWilliam

IPC分类号： G01C19/5684 ,  G01P9/04

CPC分类号： G01C19/5684

摘要： A three axis rate sensor includes a substantially planar vibratory resonator having a substantially ring or hoop-like structure with inner and outer peripheries extending around a common axis, drive means for causing the resonator to vibrate in a Cos 2θ vibration mode, carrier mode pick-off means for sensing movement of the resonator in response to the applied drive z-axis response mode, pick-off means for detecting movement of the resonator in response to rotation about the z-axis, z-axis response mode drive means for nulling said motion, x-axis response mode pick-off mean for detecting movement of the resonator in response to rotation about the x-axis, x-axis response mode drive means for nulling said motion, y-axis response mode pick-off mean for detecting movement of the resonator in response to rotation about the y-axis, y-axis response mode drive means for nulling said motion, and support means for flexibly supporting the resonator and for allowing the resonator to vibrate relative to the support means in response to the drive means and the applied rotation wherein the support means comprises only L support beams, where L≠2K, and K=0, 1, 2 or 3. For example there may be three, five, six or seven support beams.

摘要翻译： 三轴速率传感器包括基本上平面的振动谐振器，其具有基本上环形或环形结构，其具有围绕公共轴线延伸的内周和外周;驱动装置，用于使谐振器以Cos2θ振动模式振动， 用于响应于施加的驱动z轴响应模式感测谐振器的移动的关闭装置，用于响应于围绕z轴的旋转来检测谐振器的移动的拾取装置，用于使所述 运动，x轴响应模式拾取装置，用于响应围绕x轴的旋转检测谐振器的移动，用于使所述运动归零的x轴响应模式驱动装置，用于检测的y轴响应模式检测装置 响应于围绕y轴的旋转的谐振器的移动，用于使所述运动归零的y轴响应模式驱动装置，以及用于灵活地支撑谐振器并允许谐振器振动的支撑装置 与支撑装置相对应于驱动装置和所施加的旋转，其中支撑装置仅包括L支撑梁，其中L≥2K，K = 0,1,2或3。 例如，可能有三个，五个，六个或七个支撑梁。

公开(公告)号：US06805007B2

公开(公告)日：2004-10-19

申请号：US10181765

申请日：2002-07-23

申请人： Christopher P Fell ,  Kevin Townsend

发明人： Christopher P Fell ,  Kevin Townsend

IPC分类号： G01C1900

CPC分类号： G01C19/5677 ,  G01C19/5691

摘要： A vibrating structure gyroscope comprises a resonant body, a drive transducer for driving resonant motion of the body, a pick-off for producing signals representative of the resonant motion, and a signal processor for extracting z-axis orientation information and x- and y-axis rate information from the signals. The resonant body is planar and the resonant motion takes place in a vibration mode pattern whose orientation angle with respect to the body varies in accordance with z-axis orientation of the body and couples energy into an out-of-plane response mode motion in accordance with rotation of the body about the x- or y-axis. The signal processor resolves the out-of-plane response mode motion with reference to a z-axis orientation signal to extract the x- and y-axis rate information.

摘要翻译： 振动结构陀螺仪包括谐振体，用于驱动身体的共振运动的驱动换能器，用于产生表示谐振运动的信号的拾取器，以及用于提取z轴取向信息和x轴和y轴的信号处理器， 来自信号的轴速率信息。 谐振体是平面的，并且谐振运动发生在振动模式图案中，其相对于身体的取向角根据身体的z轴取向而变化，并且将能量依次转换成平面外的响应模式运动 使身体绕x轴或y轴旋转。 信号处理器参照z轴取向信号来解决平面外的响应模式运动，以提取x轴和y轴速率信息。

公开(公告)号：US06282958B1

公开(公告)日：2001-09-04

申请号：US09417105

申请日：1999-10-13

申请人： Christopher P Fell ,  Kevin Townsend ,  Ian D Hopkin

发明人： Christopher P Fell ,  Kevin Townsend ,  Ian D Hopkin

IPC分类号： G01P904

CPC分类号： G01C19/5684

摘要： An angular rate sensor or gyro includes a ring-like resonator (1) mounted by support beams (2) extending from the inner periphery of the ring (1) to a boss (4) on a base (3). The support beams (2) are flexible and allow the resonator (1) to vibrate in response to an electrostatic drive (6, 8) in a substantially undamped oscillation mode to permit the resonator to move relative to the support in response to turning rate. The support beams (2) and resonator (1) are made from crystalline silicon. Electrostatic sensors (7, 9) are provided for sensing movement of the resonator (1). The drive (6, 8) and sensors (7, 9) have plate-like elements made from crystalline silicon having surfaces located substantially normal to the plane of the resonator (1) at a spacing from the adjacent outer periphery of the resonator (1). The ratio of the thickness of the resonator (1) at the outer periphery (1b) to the width of the spacing (11) between the periphery (1b) and the element surfaces (10) is in the range of from 10:1 to 40:1.

摘要翻译： 角速率传感器或陀螺仪包括由从环（1）的内周延伸到基座（3）上的凸台（4）的支撑梁（2）安装的环形谐振器（1）。 支撑梁（2）是柔性的，并且允许谐振器（1）响应于基本无阻尼的振荡模式中的静电驱动（6,8）振动，以允许谐振器响应于转速而相对于支撑件移动。 支撑梁（2）和谐振器（1）由晶体硅制成。 静电传感器（7,9）用于感测谐振器（1）的移动。 驱动器（6,8）和传感器（7,9）具有由晶体硅制成的板状元件，其具有基本上垂直于谐振器（1）的平面的表面，其间隔与谐振器（1）的相邻外周隔开 ）。 在外周（1b）处的谐振器（1）的厚度与周边（1b）和元件表面（10）之间的间隔（11）的宽度的比率在10:1至 40：1。

公开(公告)号：US07219529B2

公开(公告)日：2007-05-22

申请号：US10523398

申请日：2003-11-12

申请人： Christopher P Fell ,  Kevin Townsend ,  Andrew Kazar

发明人： Christopher P Fell ,  Kevin Townsend ,  Andrew Kazar

IPC分类号： G01C25/00

CPC分类号： G01C19/567

摘要： Apparatus for measuring variation in scalefactor from a predetermined value for a vibrating structure gyroscope has a vibrating structure (R), fixed primary and fixed secondary drives (1, 13) for putting and maintaining the vibrating structure (R) in vibrating resonance, fixed primary and fixed secondary pick offs (2, 6) for detecting vibration of the vibrating structure (R), with the drives and pick offs (1, 13, 2, 6) being located radially around the vibrating structure (R), quadrature component and real component loop systems (7, 8), automatic gain control and phase locked loop systems (5, 22), a sin/cos pick off resolver (38) for receiving signals from the primary and secondary pick offs (2, 6) and for outputting signals to the quadrature component and real component loop systems (7, 8) and to the automatic gain control and phase locked loop systems (5, 22), a sin/cos drive resolver (37) for receiving output signals from the quadrature component and real component loop systems (7, 8) and from the automatic gain control and phase locked loop systems (5, 22) and for feeding control signals to the primary and secondary drives (1, 13), and an angular displacement control (40) for feeding angular displacement control signals to the sin/cos drive and pick off resolvers (38, 37) to control uniform displacement of the resolved carrier and response mode drives and pick offs axes angularly around the vibrating structure (R), with respect to a central axis of the vibrating structure, at a known rate.

摘要翻译： 用于根据振动结构陀螺仪的预定值测量比例因子的变化的装置具有振动结构（R），用于将振动结构（R）放置和保持在振动共振中的固定的初级和固定次级驱动装置（1,13），固定的初级 以及用于检测所述振动结构（R）的振动的固定次级拾取（2,6），所述驱动和拾取（1,13,2,6）位于所述振动结构（R）的径向周围，正交分量和 实际组件环路系统（7,8），自动增益控制和锁相环系统（5,22），用于接收来自主和次级拾取（2,6）的信号的sin / cos拾取旋转变压器（38）和 用于将信号输出到正交分量和实部环路系统（7,8）和自动增益控制和锁相环系统（5,22）; sin / cos驱动解算器（37），用于接收来自正交的输出信号 组件和实际组合 nt环路系统（7,8）以及来自自动增益控制和锁相环系统（5,22）并且用于将控制信号馈送到主驱动器（1）和辅助驱动器（1,13）的角位移控制（40） 将角位移控制信号馈送到sin / cos驱动器并拾取分解器（38,37），以控制分辨的载体和响应模式的均匀位移驱动和拾取轴围绕振动结构（R）围绕中心 振动结构的轴线。

公开(公告)号：US06848305B2

公开(公告)日：2005-02-01

申请号：US10475562

申请日：2002-09-06

申请人： Christopher P Fell ,  Rebecka Eley ,  Colin H. J. Fox ,  Stewart McWilliam

发明人： Christopher P Fell ,  Rebecka Eley ,  Colin H. J. Fox ,  Stewart McWilliam

IPC分类号： G01C19/5684 ,  G01P9/04

CPC分类号： G01C19/5684

摘要： A three axis sensor including a substantially planar vibrator resonator or having a substantially ring or hoop like structure with inner and outer peripheries e tending around a common axis, drive means for causing the resonator to vibrate in an in lane cos 2θ vibration mode, carrier mode pick-off means for sensing movement of the resonator in response to said drive means, pick-off means for sensing in plane sin 2θ resonator motion induced by rotation about the z-axis, drive means for nulling said motion, pick-off means for sensing out of plane sin 3θ resonator motion induced by rotation about the x-axis, drive means for nulling said motion, pick-off means for sensing out of plane cos 3θ resonator motion induced by rotation about the y-axis, drive means for nulling said motion, and support means for flexibly supporting the resonator and for allowing the resonator to vibrate relative to the support means in response to the drive means and to applied rotations, wherein the support means comprises only L support beams, where L≠2J×3K and J=0, 1 or 2 and K=0 or 1 with L

摘要翻译： 一种三轴传感器，包括基本上平面的振动器谐振器或者具有围绕公共轴线的具有内外周的大致环形或环形结构的驱动装置，用于使谐振器以车道2θ振动模式振动，载波模式 用于响应于所述驱动装置感测谐振器的移动的拾取装置，用于感测在围绕z轴旋转引起的平面sin2θ共振器运动的拾取装置，用于使所述运动归零的驱动装置，用于使所述运动零点的驱动装置 感测由围绕x轴的旋转引起的平面sin3θ共振器运动，用于使所述运动归零的驱动装置，用于感测由围绕y轴的旋转引起的平面cos3θ共振器运动的拾取装置，用于归零的驱动装置 所述运动以及用于灵活地支撑谐振器和用于使谐振器响应于驱动装置相对于支撑装置振动并施加旋转的支撑装置，其中th e支撑装置仅包括L支撑梁，其中L <2> 3> 3> 3，J = 0,1或2，K = 0或1，L <24。