Process for fabricating negative pressure sliders
    2.
    发明授权
    Process for fabricating negative pressure sliders 失效
    制造负压滑块的工艺

    公开(公告)号:US4564585A

    公开(公告)日:1986-01-14

    申请号:US671062

    申请日:1984-11-13

    摘要: A process for fabricating a negative pressure slider is disclosed which briefly comprises the steps of: (a) applying a dry negative photoresist layer to the surface of the slider; (b) positioning a mask having alignment marks which are too narrow to be resolved during exposure and development to pattern the photoresist layer to expose the portions of the flying surface of the slider to be milled by an ion milling process; (c) ion milling the slider wherein the patterned photoresist layer protects the flying surface of the slider while the negative pressure cavities of the slider are being milled; and (d) removing the remaining portions of the photoresist layer once the negative pressure cavities have been milled.

    摘要翻译: 公开了一种用于制造负压滑块的方法,其简要包括以下步骤:(a)将干的负性光致抗蚀剂层施加到滑块的表面; (b)定位具有对准标记的掩模,所述对准标记在曝光和显影期间太窄而不能被分辨,以使光致抗蚀剂层图案化以通过离子铣削工艺暴露待研磨的滑块的飞行表面的部分; (c)对所述滑块进行离子铣削,其中所述图案化光致抗蚀剂层保护所述滑块的飞行表面,同时所述滑块的负压腔正在被研磨; 和(d)一旦负压腔被研磨,就去除光致抗蚀剂层的剩余部分。