公开(公告)号：US10032976B2

公开(公告)日：2018-07-24

申请号：US14485944

申请日：2014-09-15

申请人： Analog Devices, Inc.

发明人： Guiti Zolfagharkhani ,  Jan H. Kuypers ,  Alexei Gaidarzhy ,  Andrew Sparks

IPC分类号： G01C19/5684 ,  H01L41/047 ,  G01C19/5755 ,  G01C19/5712 ,  H01L41/053 ,  H01L41/08 ,  H01L41/107

摘要： In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.

公开(公告)号：US09602074B2

公开(公告)日：2017-03-21

申请号：US14565261

申请日：2014-12-09

申请人： Analog Devices, Inc.

发明人： David M. Chen ,  Jan H. Kuypers ,  Alexei Gaidarzhy ,  Guiti Zolfagharkhani

IPC分类号： H03H9/02

CPC分类号： H03H9/02834 ,  H03H9/02102 ,  H03H9/02228 ,  H03H9/02448 ,  H03H9/02574

摘要： Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.

公开(公告)号：US09651376B2

公开(公告)日：2017-05-16

申请号：US14166138

申请日：2014-01-28

申请人： Analog Devices, Inc.

发明人： Guiti Zolfagharkhani ,  Jan H. Kuypers ,  Alexei Gaidarzhy ,  David M. Chen ,  Pritiraj Mohanty

IPC分类号： G01C19/56 ,  G01C19/5712

CPC分类号： G01C19/56 ,  G01C19/5712

摘要： In one embodiment, an apparatus comprises a micromechanical gyroscope and a circuit. The micromechanical gyroscope is configured to be excited in a first mode by a drive signal, and configured to be excited in a second mode by a gyroscopic effect. The circuit is coupled to the micromechanical gyroscope and configured to detect the gyroscopic effect when the micromechanical gyroscope is in the second mode.