公开(公告)号：US09979378B2

公开(公告)日：2018-05-22

申请号：US14948222

申请日：2015-11-20

申请人： Analog Devices, Inc.

发明人： Florian Thalmayr

IPC分类号： H03H9/02 ,  H03H9/56 ,  H03H9/145 ,  H01L41/04 ,  H01L41/253 ,  H03B5/32 ,  H03H9/17 ,  H03H9/70

CPC分类号： H03H9/56 ,  H01L41/042 ,  H01L41/253 ,  H03B5/32 ,  H03H9/02031 ,  H03H9/02102 ,  H03H9/02228 ,  H03H9/145 ,  H03H9/17 ,  H03H9/706

摘要： Mechanical resonators including doped piezoelectric active layers are described. The piezoelectric active layer(s) of the mechanical resonator may be doped with a dopant type and concentration suitable to increase the electromechanical coupling coefficient of the active layer. The increase in electromechanical coupling coefficient may all for improved performance and smaller size mechanical resonators than feasible without using the doping.

公开(公告)号：US20180123016A1

公开(公告)日：2018-05-03

申请号：US15857323

申请日：2017-12-28

申请人： CARNEGIE MELLON UNIVERSITY

发明人： Songbin Gong ,  Gianluca Piazza

IPC分类号： H01L41/047 ,  H03H9/13 ,  H03H9/02 ,  H03H3/02 ,  H01L41/313 ,  H01L41/187 ,  H01L41/332

CPC分类号： H01L41/047 ,  H01L41/0477 ,  H01L41/1873 ,  H01L41/313 ,  H01L41/332 ,  H03H3/02 ,  H03H9/02228 ,  H03H9/02559 ,  H03H9/13

摘要： In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.

公开(公告)号：US20170214383A1

公开(公告)日：2017-07-27

申请号：US15087409

申请日：2016-03-31

申请人： RF Micro Devices, Inc.

发明人： Kushal Bhattacharjee

IPC分类号： H03H9/02 ,  H03H3/08 ,  H03H9/25

CPC分类号： H03H9/02228 ,  H03H3/0072 ,  H03H3/0077 ,  H03H3/02 ,  H03H3/08 ,  H03H9/0009 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/02787 ,  H03H9/0296 ,  H03H9/0538 ,  H03H9/13 ,  H03H9/131 ,  H03H9/145 ,  H03H9/14564 ,  H03H9/15 ,  H03H9/17 ,  H03H9/25 ,  H03H2003/027 ,  H03H2009/02165 ,  H03H2009/02496 ,  H03H2009/155

摘要： A micro-electrical-mechanical system (MEMS) guided wave device includes a plurality of electrodes arranged below a piezoelectric layer (e.g., either embedded in a slow wave propagation layer or supported by a suspended portion of the piezoelectric layer) and configured for transduction of a lateral acoustic wave in the piezoelectric layer. The piezoelectric layer permits one or more additions or modifications to be made thereto, such as trimming (thinning) of selective areas, addition of loading materials, sandwiching of piezoelectric layer regions between electrodes to yield capacitive elements or non-linear elastic convolvers, addition of sensing materials, and addition of functional layers providing mixed domain signal processing utility.

公开(公告)号：US20170201235A1

公开(公告)日：2017-07-13

申请号：US15315370

申请日：2015-08-05

申请人： EPCOS AG

发明人： Stefan Freisleben

IPC分类号： H03H9/64 ,  H03H9/54 ,  H03H9/02

CPC分类号： H03H9/6483 ,  H03H9/02228 ,  H03H9/02535 ,  H03H9/542 ,  H03H9/568 ,  H03H9/605

摘要： For a reactance filter constructed from serial and parallel resonators, in order to improve the linearity, it is proposed to connect a capacitor in series or in parallel either with a parallel resonator or a cascade of parallel resonators or with a series resonator or a cascade of series resonators.

公开(公告)号：US09698754B2

公开(公告)日：2017-07-04

申请号：US14954251

申请日：2015-11-30

申请人： Avago Technologies General IP (Singapore) Pte. Ltd.

发明人： Dariusz Burak

IPC分类号： H03H9/02 ,  H01L41/047 ,  H01L41/053 ,  H03H9/17

CPC分类号： H03H9/02228 ,  H01L41/047 ,  H01L41/053 ,  H03H9/173 ,  H03H9/175

摘要： A capacitive coupled resonator device includes a substrate, a bottom electrode, a piezoelectric layer, a top electrode, and at least one support frame positioned between the piezoelectric layer and the top electrode and/or positioned between the piezoelectric layer and the bottom electrode. The top electrode includes a first top comb electrode having a first top bus bar and first top fingers extending in a first direction from the first top bus bar, and a second top comb electrode having a second top bus bar and second top fingers extending in a second direction from the second top bus bar, the second direction being substantially opposite to the first direction such that the first and second top fingers form a top interleaving pattern. The at least one support frame includes air-gaps separating at least one of the top electrode and the bottom electrode from the piezoelectric layer, respectively.

公开(公告)号：US09691963B2

公开(公告)日：2017-06-27

申请号：US14954269

申请日：2015-11-30

申请人： Avago Technologies General IP (Singapore) Pte. Ltd.

发明人： Dariusz Burak

IPC分类号： H03H9/02 ,  H01L41/047 ,  H01L41/053 ,  H03H9/17

CPC分类号： H01L41/047 ,  H01L41/053 ,  H03H9/02228 ,  H03H9/173 ,  H03H9/175

摘要： A capacitive coupled resonator device includes a substrate, a bottom electrode, a piezoelectric layer, a top electrode, and at least one set of support pillars positioned between the piezoelectric layer and the top electrode and/or between the piezoelectric layer and the bottom electrode. The top electrode includes a first top comb electrode having a first top bus bar and first top fingers extending in a first direction from the first top bus bar, and a second top comb electrode having a second top bus bar and second top fingers extending in a second direction from the second top bus bar, the second direction being substantially opposite the first direction such that the first and second top fingers form a top interleaving pattern. The at least one set of support pillars separates at least one of the top and bottom electrodes from the piezoelectric layer, respectively, thereby defining corresponding air-gaps.

公开(公告)号：US20170149405A1

公开(公告)日：2017-05-25

申请号：US15396840

申请日：2017-01-03

申请人： Murata Manufacturing Co., Ltd.

发明人： Yutaka KISHIMOTO

IPC分类号： H03H3/02 ,  H03H9/25

CPC分类号： H03H3/02 ,  H03H3/08 ,  H03H9/02228 ,  H03H9/173 ,  H03H9/25 ,  H03H2003/021

摘要： In a piezoelectric resonator manufacturing method, a sacrificial layer is formed on a back surface of a piezoelectric substrate. A support layer is formed on the back surface of the piezoelectric substrate so as to cover the sacrificial layer. A support layer as a piezoelectric resonator is formed by flattening the support layer. A recess in which the surface of the sacrificial layer is recessed with respect to the surface of the support layer is formed by abrading the surfaces of the support layer and the sacrificial layer. The recess extends to a vicinity of a boundary surface between the support layer and the sacrificial layer in the support layer. A support substrate is adhered to the surfaces of the support layer including the recess and the sacrificial layer via an adhesive material.

公开(公告)号：US09602074B2

公开(公告)日：2017-03-21

申请号：US14565261

申请日：2014-12-09

申请人： Analog Devices, Inc.

发明人： David M. Chen ,  Jan H. Kuypers ,  Alexei Gaidarzhy ,  Guiti Zolfagharkhani

IPC分类号： H03H9/02

CPC分类号： H03H9/02834 ,  H03H9/02102 ,  H03H9/02228 ,  H03H9/02448 ,  H03H9/02574

摘要： Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.

公开(公告)号：US20170069822A1

公开(公告)日：2017-03-09

申请号：US15357218

申请日：2016-11-21

申请人： Murata Manufacturing Co., Ltd.

发明人： TOSHIO NISHIMURA

IPC分类号： H01L41/053 ,  H01L41/107

CPC分类号： H01L41/053 ,  H01L41/107 ,  H03H9/02228 ,  H03H9/02338

摘要： A vibrating device includes a vibration plate that vibrates at a harmonic of a contour vibration and on which plural vibration members to are disposed. Moreover, support members are provided having first ends connected to the vibration plate and second ends connected to a frame base that surrounds the vibration plate. Cavities extending in a direction that intersects a direction in which the support members extend are formed in the base with flexure-vibration members formed therebetween. Both ends of the flexure-vibration members are joined to the base to serve as stationary ends. Moreover, a length between ends of the flexure-vibration members and a connected portion where each of the flexure-vibration member is connected to the corresponding support members is λ/4, where λ is a wave length of a flexural vibration corresponding to a frequency of a natural vibration in the vibration plate.

摘要翻译： 振动装置包括以轮廓振动的谐波振动并且配置有多个振动部件的振动板。 此外，支撑构件设置有第一端连接到振动板，第二端连接到围绕振动板的框架基座。 在与支撑构件延伸的方向相交的方向上延伸的腔室形成在基部中，其间形成有挠曲振动构件。 弯曲振动件的两端连接到基座上以用作固定端。 此外，挠曲振动部件的端部与挠曲振动部件连接到对应的支撑部件的连接部分之间的长度为λ/ 4，其中λ为对应于频率的挠曲振动的波长 在振动板上产生自然振动。

公开(公告)号：US20160352304A1

公开(公告)日：2016-12-01

申请号：US15233016

申请日：2016-08-10

申请人： Murata Manufacturing Co., Ltd.

发明人： Michio KADOTA ,  Tetsuya KIMURA ,  Kenya HASHIMOTO ,  Shuji TANAKA

IPC分类号： H03H9/145 ,  H03H9/02

CPC分类号： H03H9/14538 ,  H03H9/02228 ,  H03H9/02559

摘要： An elastic wave device includes a first IDT electrode on a first main surface of a LiNbO3 substrate, and a second IDT electrode on a second main surface thereof. The application of alternating voltages with reversed phases to each other to the first and second IDT electrodes excites plate waves in which SH waves in a high order mode predominate. The elastic wave device uses the plate waves in the high order mode in which the SH waves predominate.

摘要翻译： 弹性波装置包括在LiNbO 3基板的第一主表面上的第一IDT电极和在其第二主表面上的第二IDT电极。 将具有反相的交变电压彼此应用于第一和第二IDT电极激发其中以高阶模式的SH波为主的平板波。 弹性波装置以SH波为主的高阶模式使用平板波。