公开(公告)号：US4077416A

公开(公告)日：1978-03-07

申请号：US679581

申请日：1976-04-23

申请人： Anderson F. Johnson, Jr. ,  Edward L. Stork ,  Richard H. Winings

发明人： Anderson F. Johnson, Jr. ,  Edward L. Stork ,  Richard H. Winings

IPC分类号： H01L21/306 ,  C23F1/08 ,  H01L21/00 ,  H01L21/02 ,  H01L21/673 ,  B08B3/04

CPC分类号： H01L21/6732 ,  C23F1/08 ,  H01L21/67086 ,  H01L21/67326 ,  Y10S134/902

摘要： To eliminate the manual handling of individual articles associated with loading and unloading conventional treating apparatus, a plurality of articles are simultaneously treated in the carriers which are used for batch handling prior to and subsequent to the treating operation. In a disclosed embodiment, wafer-shaped articles are held in mutually spaced substantially parallel relationship in a plurality of slots in a first carrier having an open face through which the wafers can be inserted and removed. The open face of the first carrier is abutted to the open face of an empty second carrier having at least a corresponding plurality of slots, such that the slots of the first carrier are aligned with the slots of the second carrier. The abutted carriers, with the wafers contained therein, are submersed in a treating medium and rotated about an axis running through the abutted faces of the carriers. The speed of rotation is maintained sufficient to produce rolling of the wafers through the axis, back and forth between the carriers.

摘要翻译： 为了消除与装卸常规处理装置相关的单个物品的手动处理，在处理操作之前和之后用于批处理的载体中同时处理多个制品。 在公开的实施例中，晶片状制品在具有开放面的第一载体中的多个槽中以相互间隔开的大致平行的关系保持，晶片可以通过该开口面被插入和移除。 第一载体的开口面抵靠具有至少相应多个槽的空第二载体的开口面，使得第一载体的槽与第二载体的槽对准。 其中容纳有晶片的邻接的载体浸没在处理介质中并围绕穿过载体的邻接面的轴线旋转。 旋转速度保持足以通过轴线在载体之间来回滚动晶片。

公开(公告)号：US3977926A

公开(公告)日：1976-08-31

申请号：US534918

申请日：1974-12-20

申请人： Anderson F. Johnson, Jr. ,  Edward L. Stork ,  Richard H. Winings

发明人： Anderson F. Johnson, Jr. ,  Edward L. Stork ,  Richard H. Winings

IPC分类号： H01L21/306 ,  C23F1/08 ,  H01L21/00 ,  H01L21/02 ,  H01L21/673

CPC分类号： H01L21/6732 ,  C23F1/08 ,  H01L21/67086 ,  H01L21/67326 ,  Y10S134/902

摘要： To eliminate the manual handling of individual articles associated with loading and unloading conventional treating apparatus, a plurality of articles are simultaneously treated in the carriers which are used for batch handling prior to and subsequent to the treating operation. In a disclosed embodiment, wafer-shaped articles are held in mutually spaced substantially parallel relationship in a plurality of slots in a first carrier having an open face through which the wafers can be inserted and removed. The open face of the first carrier is abutted to the open face of an empty second carrier having at least a corresponding plurality of slots, such that the slots of the first carrier are aligned with the slots of the second carrier. The abutted carriers, with the wafers contained therein, are submersed in a treating medium and rotated about an axis running through the abutted faces of the carriers. The speed of rotation is maintained sufficient to produce rolling of the wafers through the axis, back and forth between the carriers.

摘要翻译： 为了消除与装卸常规处理装置相关的单个物品的手动处理，在处理操作之前和之后用于批处理的载体中同时处理多个制品。 在公开的实施例中，晶片状制品在具有开放面的第一载体中的多个槽中以相互间隔开的大致平行的关系保持，晶片可以通过该开口面被插入和移除。 第一载体的开口面抵靠具有至少相应多个槽的空第二载体的开口面，使得第一载体的槽与第二载体的槽对准。 其中容纳有晶片的邻接的载体浸没在处理介质中并围绕穿过载体的邻接面的轴线旋转。 旋转速度保持足以通过轴线在载体之间来回滚动晶片。