公开(公告)号：US20070272685A1

公开(公告)日：2007-11-29

申请号：US11578393

申请日：2005-04-05

申请人： Andreas Schreiber ,  Bodo Kuehn ,  Franz-Josef Schilling ,  Erich Arnold ,  Hans-Dieter Witzke

发明人： Andreas Schreiber ,  Bodo Kuehn ,  Franz-Josef Schilling ,  Erich Arnold ,  Hans-Dieter Witzke

IPC分类号： H01J61/38

CPC分类号： C03B19/01 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/23 ,  C03C3/06

摘要： In a known method, a quartz glass component is produced for a UV radiation source by melting SiO2-containing grain. Starting therefrom, to indicate an inexpensive method by means of which a quartz glass component is obtained that is characterized by high radiation resistance, it is suggested according to the invention that synthetically produced quartz crystals are molten to obtain a pre-product which consists of quartz glass containing hydroxyl groups in a number greater than the number of SiH groups, and that for the elimination of SiH groups the pre-product is subjected to an annealing treatment at a temperature of at least 850° C., whereby the quartz glass component is obtained. In the quartz glass component of the invention, the quartz glass is molten from synthetically produced quartz crystals, and it has a content of SiH groups of less than 5×1017 molecules/cm3.

摘要翻译： 在已知的方法中，通过熔化含SiO 2的晶粒来生产用于UV辐射源的石英玻璃组分。 从其开始，为了表明一种廉价的方法，通过该方法获得了以高耐辐射性为特征的石英玻璃组分，根据本发明提出，将合成的石英晶体熔融以获得由石英组成的预制品 含有数量大于SiH基数的羟基的玻璃，并且为了除去SiH基，将前产物在至少850℃的温度下进行退火处理，由此石英玻璃成分为 获得。 在本发明的石英玻璃组分中，石英玻璃从合成产生的石英晶体熔化，并且其SiH基含量小于5×10 17分子/ cm 3 / >。

公开(公告)号：US06734629B2

公开(公告)日：2004-05-11

申请号：US10207129

申请日：2002-07-30

申请人： Erich Arnold ,  Renate Hirrle ,  Christina Wille ,  Hans-Dieter Witzke

发明人： Erich Arnold ,  Renate Hirrle ,  Christina Wille ,  Hans-Dieter Witzke

IPC分类号： H01J6135

CPC分类号： H01J61/827 ,  C03C17/25 ,  C03C2217/214 ,  C03C2217/228 ,  C03C2218/111 ,  H01J9/20 ,  H01J61/125 ,  H01J61/35 ,  H01J65/00

摘要： A discharge vessel with an excimer fill comprises a cap, electrodes and a fill having at least one noble gas and a halogen, which, when the lamp is operating, together form an excimer, the discharge vessel being manufactured from quartz glass. The inner wall of the discharge vessel is completely covered with a passivation layer of a metal oxide of the metals Al, Hf, Y or Sc or the mixed oxides thereof, the layer having an amorphous structure and its layer thickness being 20 to 200 nm.

摘要翻译： 具有准分子填充物的放电容器包括帽，电极和具有至少一种惰性气体和卤素的填充物，当灯操作时，它们一起形成准分子，放电容器由石英玻璃制成。 放电容器的内壁完全被金属Al，Hf，Y或Sc的金属氧化物或其混合氧化物的钝化层覆盖，该层具有非晶结构，其层厚度为20〜200nm。