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公开(公告)号：US20100186132A1
公开(公告)日：2010-07-22
申请号：US12447876
申请日：2007-10-31
申请人： Andrew Humphris , David Catto
发明人： Andrew Humphris , David Catto
摘要： A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus.
摘要翻译： 探头组件用于扫描探针显微镜。 探针组件包括具有多个至少三个基本上相同的探针的载体，每个探针具有位于多个探针尖端共同的平面上且可从该平面移动的尖端。 组件还包括寻址装置，其适于选择多个探针之一相对于探针的其余部分的大部分相对运动。 这种组件具有促进快速（也许是自动化）使用的探针的更换的潜力，适用于高速扫描装置。
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公开(公告)号：US08296856B2
公开(公告)日：2012-10-23
申请号：US13147864
申请日：2010-02-04
申请人： Andrew Humphris , David Catto
发明人： Andrew Humphris , David Catto
CPC分类号： G01Q10/065 , G01Q30/04
摘要： A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
摘要翻译： 控制系统（32,75）用于扫描探针显微镜，其中测量数据在被描述为探针和样品相对于彼此移动的扫描图案内的位置被收集。 控制系统与位置检测系统（34）一起使用，位置检测系统（34）测量探针和样本中的至少一个的位置，使得它们的相对空间位置（x，y）被确定。 然后，测量数据可以在构建图像时与经验确定的空间位置相关联。 使用经验位置数据意味着图像质量不受显微镜扫描系统机械控制探针和样品的相对位置的能力的限制。
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公开(公告)号：US08910311B2
公开(公告)日：2014-12-09
申请号：US12447876
申请日：2007-10-31
申请人： Andrew Humphris , David Catto
发明人： Andrew Humphris , David Catto
摘要： A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus.
摘要翻译： 探头组件用于扫描探针显微镜。 探针组件包括具有多个至少三个基本上相同的探针的载体，每个探针具有位于多个探针尖端共同的平面上且可从该平面移动的尖端。 组件还包括寻址装置，其适于选择多个探针之一相对于探针的其余部分的大部分相对运动。 这种组件具有促进快速（也许是自动化）使用的探针的更换的潜力，适用于高速扫描装置。
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公开(公告)号：US20110296561A1
公开(公告)日：2011-12-01
申请号：US13147864
申请日：2010-02-04
申请人： Andrew Humphris , David Catto
发明人： Andrew Humphris , David Catto
CPC分类号： G01Q10/065 , G01Q30/04
摘要： A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
摘要翻译： 控制系统（32,75）用于扫描探针显微镜，其中测量数据在被描述为探针和样品相对于彼此移动的扫描图案内的位置被收集。 控制系统与位置检测系统（34）一起使用，位置检测系统（34）测量探针和样本中的至少一个的位置，使得它们的相对空间位置（x，y）被确定。 然后，测量数据可以在构建图像时与经验确定的空间位置相关联。 使用经验位置数据意味着图像质量不受显微镜扫描系统机械控制探针和样品的相对位置的能力的限制。
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公开(公告)号：US09557347B2
公开(公告)日：2017-01-31
申请号：US13982945
申请日：2012-01-31
申请人： Andrew Humphris
发明人： Andrew Humphris
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/065
摘要： A scanning probe microscope comprising a probe that is mechanically responsive to a driving force. A signal generator provides a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample. A detection system is arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam. Image processing apparatus is arranged to use the height signal to form an image of the sample. Signal processing apparatus is arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample. In response to detection of the surface position, the signal processing apparatus prompts the signal generator to modify the drive signal.
摘要翻译： 扫描探针显微镜，包括机械地响应于驱动力的探针。 信号发生器向产生驱动力的致动器提供驱动信号，驱动信号使得致动器重复地朝向和远离样品移动探头。 检测系统被布置成输出指示从探针反射的光与高度参考光束之间的路径差的高度信号。 图像处理装置被配置为使用高度信号来形成样本的图像。 信号处理装置被布置成当探针接近样本并检测探针与样品相互作用的表面位置时监测探针。 响应于表面位置的检测，信号处理装置提示信号发生器修改驱动信号。
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公开(公告)号：US09052340B2
公开(公告)日：2015-06-09
申请号：US13636216
申请日：2011-03-29
申请人： Andrew Humphris
发明人： Andrew Humphris
摘要： A probe assembly for use with a scanning probe microscope includes a carrier supporting at least two probes mounted on a tilt stage arranged to tilt the carrier about an axis. The probes may be distributed on one or more surfaces. In use, the tilt stage operates either as a selection device, orienting a selected probe or surface towards a sample, and/or as an alignment tool, adjusting a planar array of probes such that they are better aligned with the sample. This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation.
摘要翻译： 与扫描探针显微镜一起使用的探针组件包括支撑安装在倾斜台上的至少两个探针的载体，所述倾斜平台布置成围绕轴线倾斜载体。 探针可以分布在一个或多个表面上。 在使用中，倾斜台用作选择装置，将选定的探针或表面朝向样品定向，和/或作为对准工具，调整探针的平面阵列，使得它们与样品更好地对准。 这在显微镜操作期间提供了自动交换探针的潜力，增加了速度和精度。
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公开(公告)号：US20140026263A1
公开(公告)日：2014-01-23
申请号：US13982945
申请日：2012-01-31
申请人： Andrew Humphris
发明人： Andrew Humphris
IPC分类号： G01Q10/04
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/065
摘要： A scanning probe microscope comprising a probe that is mechanically responsive to a driving force. A signal generator provides a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample. A detection system is arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam. Image processing apparatus is arranged to use the height signal to form an image of the sample. Signal processing apparatus is arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample. In response to detection of the surface position, the signal processing apparatus prompts the signal generator to modify the drive signal.
摘要翻译： 扫描探针显微镜，包括机械地响应于驱动力的探针。 信号发生器向产生驱动力的致动器提供驱动信号，驱动信号使得致动器重复地朝向和远离样品移动探头。 检测系统被布置成输出指示从探针反射的光与高度参考光束之间的路径差的高度信号。 图像处理装置被配置为使用高度信号来形成样本的图像。 信号处理装置被布置成当探针接近样本并检测探针与样品相互作用的表面位置时监测探针。 响应于表面位置的检测，信号处理装置提示信号发生器修改驱动信号。
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公开(公告)号：US08220066B2
公开(公告)日：2012-07-10
申请号：US12672022
申请日：2008-08-04
申请人： Andrew Humphris
发明人： Andrew Humphris
IPC分类号： G01Q20/02
摘要： A The local probe microscopy apparatus (1) comprises a probe (3) with translation stages (5a, 5b) for controlling the position of the probe (3) relative to a sample surface. The probe (3) has a feedback mechanism (6, 5 7) for maintaining the deflection of the probe and a height measuring system (9) which includes means for compensating for environmental noise. The local probe microscopy apparatus is particularly suitable for use as a wafer inspection tool in a wafer fabrication plant where the inspection tool is liable to be exposed to significant mechanical vibration.
摘要翻译： A本地探针显微镜装置（1）包括具有平移台（5a，5b）的探针（3），用于控制探针（3）相对于样品表面的位置。 探针（3）具有用于保持探头的偏转的反馈机构（6,7）和包括用于补偿环境噪声的装置的高度测量系统（9）。 局部探针显微镜装置特别适合用作晶片制造厂中的晶片检查工具，其中检查工具容易暴露于显着的机械振动。
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公开(公告)号：US20110138506A1
公开(公告)日：2011-06-09
申请号：US12996518
申请日：2009-06-08
申请人： Andrew Humphris
发明人： Andrew Humphris
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02 , G01B11/0608 , G01B2290/45 , G01Q10/065
摘要： A method of probe alignment is described in which an interrogating light beam is aligned with the probe of a scanning probe microscope. The methods described ensure that the light beam is positioned as closely as possible to a point directly above the probe tip. This improves image quality by removing variations that may arise if cantilever deflection is allowed to vary during the course of a scan and/or if scanning at high scanning speeds that may excite transient motion of the probe.
摘要翻译： 描述了探针对准的方法，其中询问光束与扫描探针显微镜的探针对准。 所描述的方法确保光束尽可能靠近探针尖端正上方的位置。 这可以通过去除在扫描过程中允许悬臂偏转变化和/或如果以可能激发探针的瞬态运动的高扫描速度进行扫描时可能出现的变化来提高图像质量。
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公开(公告)号：US08528110B2
公开(公告)日：2013-09-03
申请号：US12996512
申请日：2009-06-08
申请人： Andrew Humphris
发明人： Andrew Humphris
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02 , G01B11/0608 , G01B2290/45 , G01Q10/065
摘要： A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.
摘要翻译： 与扫描探针显微镜一起使用的探针检测系统（74）包括高度检测系统（88）和偏转检测系统（28）。 当扫描样品表面时，从显微镜探针（16）反射的光被分成两部分。 第一部件（84）由偏转检测系统（28）分析，并被用于在扫描期间维持平均探针偏转基本上恒定的反馈系统。 通过高度检测系统（88）分析第二部件（86），从而可以获得在固定参考点上方的探头高度的指示，从而获得样品表面的图像。 这种双重检测系统特别适用于快速扫描应用，其中反馈系统不能以调整像素位置之间的探针高度所需的速率进行响应。
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