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公开(公告)号：US07540968B2
公开(公告)日：2009-06-02
申请号：US11376114
申请日：2006-03-16
IPC分类号： H01L21/302
CPC分类号： H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/316 , Y10T29/42
摘要： A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.
摘要翻译： 微型移动装置包括：基底基板，固定在基底基板上的固定部分，具有连接固定部分并且沿着基底基板延伸的固定端的可动部分;以及设置在可动部分和固定部分上的压电驱动器 在与基底基板相对的一侧上。 压电驱动器具有由与可移动部分和固定部分接触的第一电极膜提供的层压结构，第一电极膜和第二电极膜之间的第二电极膜和压电膜。 可移动部分和固定部分中的至少一个设置有沿着压电驱动器延伸的凹槽。
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公开(公告)号：US07307827B2
公开(公告)日：2007-12-11
申请号：US11104453
申请日：2005-04-13
CPC分类号： H01G5/18 , H01G5/16 , Y10T29/417 , Y10T29/435
摘要： The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.
摘要翻译： 第一可动电极是平坦的，但是第二可动电极变形为凸形。 电介质层被放置在第二可动电极的相对表面上。 通过调整施加在第一可动电极和第二可动电极之间的电压，通过在两个电极之间产生的静电吸引力，确保两个电极之间的任意距离，并获得所需的静电电容。 当两个电极之间的距离缩短时，首先在中心处，第一可移动电极的一部分和第二可动电极的一部分彼此接触，并且它们之间具有介电层。 然后，第一可动电极和电介质层（第二可动电极）从接触部朝向周边依次相接触，接触面积逐渐增大。
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公开(公告)号：US07851976B2
公开(公告)日：2010-12-14
申请号：US12436178
申请日：2009-05-06
IPC分类号： H01L41/04 , H01L41/047
CPC分类号： H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/316 , Y10T29/42
摘要： A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.
摘要翻译： 微型移动装置包括：基底基板，固定在基底基板上的固定部分，具有连接固定部分并且沿着基底基板延伸的固定端的可动部分;以及设置在可动部分和固定部分上的压电驱动器 在与基底基板相对的一侧上。 压电驱动器具有由与可移动部分和固定部分接触的第一电极膜提供的层压结构，第一电极膜和第二电极膜之间的第二电极膜和压电膜。 可移动部分和固定部分中的至少一个设置有沿着压电驱动器延伸的凹槽。
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4.发明申请公开(公告)号：US20090212664A1
公开(公告)日：2009-08-27
申请号：US12436178
申请日：2009-05-06
IPC分类号： H01L41/047
CPC分类号： H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/316 , Y10T29/42
摘要： A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.
摘要翻译： 微型移动装置包括：基底基板，固定在基底基板上的固定部分，具有连接固定部分并且沿着基底基板延伸的固定端的可动部分;以及设置在可动部分和固定部分上的压电驱动器 在与基底基板相对的一侧上。 压电驱动器具有由与可移动部分和固定部分接触的第一电极膜提供的层压结构，第一电极膜和第二电极膜之间的第二电极膜和压电膜。 可移动部分和固定部分中的至少一个设置有沿着压电驱动器延伸的凹槽。
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公开(公告)号：US07535326B2
公开(公告)日：2009-05-19
申请号：US11245007
申请日：2005-10-07
IPC分类号： H01H51/22
CPC分类号： H01H57/00 , H01H59/0009 , H01H2057/006
摘要： A microswitching element includes a base substrate, a fixing portion attached to the base substrate, and a movable portion including a fixed end fixed to the fixing portion. The movable portion is surrounded by the fixing portion via a slit having a pair of closed ends. The movable portion includes a first surface and a second surface. The first surface faces the base substrate, and the second surface is opposite to the first surface. The microswitching element also includes a movable contact portion provided on the second surface of the movable portion, and a pair of fixed contact electrodes each including a contact surface facing the movable contact portion. The fixed contact electrodes are attached to the fixing portion.
摘要翻译： 微型开关元件包括基底基板，附接到基底基板的固定部分以及固定在固定部分上的固定端部的可动部分。 可移动部分通过具有一对封闭端的狭缝被固定部分包围。 可移动部分包括第一表面和第二表面。 第一表面面向基底，第二表面与第一表面相对。 微动开关元件还包括设置在可动部分的第二表面上的可动接触部分和一对固定接触电极，每个固定接触电极包括面向可动接触部分的接触表面。 固定接触电极附接到固定部分。
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公开(公告)号：US20060171097A1
公开(公告)日：2006-08-03
申请号：US11104453
申请日：2005-04-13
IPC分类号： H01G5/00
CPC分类号： H01G5/18 , H01G5/16 , Y10T29/417 , Y10T29/435
摘要： The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.
摘要翻译： 第一可动电极是平坦的，但是第二可动电极变形为凸形。 电介质层被放置在第二可动电极的相对表面上。 通过调整施加在第一可动电极和第二可动电极之间的电压，通过在两个电极之间产生的静电吸引力确保两个电极之间的任意距离，并获得所需的静电电容。 当两个电极之间的距离缩短时，首先在中心处，第一可移动电极的一部分和第二可动电极的一部分彼此接触，并且它们之间具有介电层。 然后，第一可动电极和电介质层（第二可动电极）从接触部朝向周边依次相接触，接触面积逐渐增大。
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公开(公告)号：US20060208611A1
公开(公告)日：2006-09-21
申请号：US11376114
申请日：2006-03-16
IPC分类号： H01L41/00
CPC分类号： H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/316 , Y10T29/42
摘要： A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.
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公开(公告)号：US20070039147A1
公开(公告)日：2007-02-22
申请号：US11585245
申请日：2006-10-24
IPC分类号： H01G9/00
CPC分类号： H01G5/18 , H01G5/16 , Y10T29/435
摘要： The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.
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公开(公告)号：US20060181375A1
公开(公告)日：2006-08-17
申请号：US11245007
申请日：2005-10-07
IPC分类号： H01H51/22
CPC分类号： H01H57/00 , H01H59/0009 , H01H2057/006
摘要： A microswitching element includes a base substrate, a fixing portion attached to the base substrate, and a movable portion including a fixed end fixed to the fixing portion. The movable portion is surrounded by the fixing portion via a slit having a pair of closed ends. The movable portion includes a first surface and a second surface. The first surface faces the base substrate, and the second surface is opposite to the first surface. The microswitching element also includes a movable contact portion provided on the second surface of the movable portion, and a pair of fixed contact electrodes each including a contact surface facing the movable contact portion. The fixed contact electrodes are attached to the fixing portion.
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公开(公告)号：US07446994B2
公开(公告)日：2008-11-04
申请号：US11504677
申请日：2006-08-16
IPC分类号： H01G5/01
摘要： A lower movable electrode 35, having line sections 35a, 35a on both ends and a capacitor section 35b in the center, and an upper movable electrode 37, having line sections 37a, 37a on both ends and a capacitor section 37b in the center, are placed so that the capacitor sections 35b, 37b face each other, and drive electrodes of lower-movable-electrode actuators 27a, 27b, 27c, 27d driving the lower movable electrode 35 and upper-movable-electrode actuators 29a, 29b, 29c, 29d driving the upper movable electrode 37 are electrically separated from the lower movable electrode 35 and upper movable electrode 37. These actuators 27a to 27d and/or 29a to 29d move the lower movable electrode 35 and/or upper movable electrode 37 to adjust the distance between both capacitor sections 35b, 37b, and control the electrostatic capacity.
摘要翻译： 在两端具有线路部分35a，35a和中心的电容器部分35b的下部可动电极35以及两端线路部分37a，37a和电容器部分37的上部可动电极37 b放置成使得电容器部分35b，37b彼此面对，并且驱动下部可动电极35和上部的可动电极致动器27a，27b，27c，27d的驱动电极 驱动上可动电极37的可动电极致动器29a，29b，29c，29d与下可动电极35和上可动电极37电气分离。 这些致动器27a至27d和/或29a至29d移动下部可动电极35和/或上部可动电极37，以调节两个电容器部分35b，37b之间的距离，并控制静电电容。
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