公开(公告)号：US20190043744A1

公开(公告)日：2019-02-07

申请号：US16046105

申请日：2018-07-26

Applicant: Applied Materials, Inc.

Inventor： Tom K. CHO ,  Ali SALEHPOUR ,  Stanley WU ,  Ying MA

IPC: H01L21/677 ,  H01L21/67

Abstract: A method and apparatus for monitoring substrate lift pin operation is disclosed and includes a support pedestal for a vacuum chamber, the support pedestal comprising a body having a plurality of openings formed between two major sides of the body, and a substrate support device disposed in each of the plurality of openings, each of the support devices comprising a housing disposed in the body, the housing having a bore formed therethrough, and a support pin disposed in the bore, wherein the body includes a monitoring device positioned proximal to the support pins of each of the substrate support devices.