公开(公告)号：US20220277982A1

公开(公告)日：2022-09-01

申请号：US17750295

申请日：2022-05-20

Applicant: Applied Materials, Inc.

Inventor： Phillip CRIMINALE ,  Zhiqiang GUO ,  Andrew MYLES

IPC: H01L21/683 ,  H01L21/67 ,  H01L21/66 ,  H05B1/02

Abstract: Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller.

公开(公告)号：US20240178035A1

公开(公告)日：2024-05-30

申请号：US18435175

申请日：2024-02-07

Applicant: Applied Materials, Inc.

Inventor： Andrew MYLES ,  Denis Martin KOOSAU ,  Peter MURAOKA ,  Phillip CRIMINALE

IPC: H01L21/68 ,  H01J37/32 ,  H01L21/687

CPC classification number: H01L21/68 ,  H01J37/32642 ,  H01J37/3288 ,  H01J37/32908 ,  H01J37/32935 ,  H01J37/3299 ,  H01L21/681 ,  H01L21/68721 ,  H01L21/68735 ,  H01L21/68742

Abstract: Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.

公开(公告)号：US20200294836A1

公开(公告)日：2020-09-17

申请号：US16352349

申请日：2019-03-13

Applicant: Applied Materials, Inc.

Inventor： Phillip CRIMINALE ,  Zhiqiang GUO ,  Andrew MYLES

IPC: H01L21/683 ,  H01L21/67 ,  H01L21/66 ,  H05B1/02

Abstract: Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller

公开(公告)号：US20190385880A1

公开(公告)日：2019-12-19

申请号：US16407520

申请日：2019-05-09

Applicant: Applied Materials, Inc.

Inventor： Andrew MYLES ,  Denis M. KOOSAU ,  Peter MURAOKA ,  Phillip A. CRIMINALE

IPC: H01L21/68 ,  H01L21/687 ,  H01L23/544

Abstract: Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.

公开(公告)号：US20220406635A1

公开(公告)日：2022-12-22

申请号：US17352097

申请日：2021-06-18

Applicant: Applied Materials, Inc.

Inventor： Andrew MYLES ,  Andreas SCHMID ,  Phillip A. CRIMINALE ,  Steven E. BABAYAN

IPC: H01L21/67 ,  G05B23/02 ,  G01B9/02 ,  G01B11/27

Abstract: Examples disclosed herein are directed to a method and apparatus for determining a position of a ring within a process kit. In one example, a sensor assembly for a substrate processing chamber is provided. The sensor assembly includes a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface. The housing also has a recess in the top surface, the recess forming an interior volume within the housing. The sensory assembly includes a bias member, and a contact member disposed on the bias member. The bias member and contact member are disposed within the recess. A sensor is configured to detect a displacement of the contact member. The displacement of the contact member corresponds to a relative position of an edge ring.