公开(公告)号：US20040212947A1

公开(公告)日：2004-10-28

申请号：US10421473

申请日：2003-04-22

Applicant: Applied Materials, Inc.

Inventor： Andrew Nguyen ,  Wing Lau Cheng ,  Hiroji Hanawa ,  Semyon L. Kats ,  Kartik Ramaswamy ,  Yan Ye ,  Kwok Manus Wong ,  Daniel J. Hoffman ,  Tetsuya Ishikawa ,  Brian C. Lue

IPC: H02H001/00

CPC classification number: H01L21/67109

Abstract: A support for a substrate processing chamber has upper and lower walls that are joined by a peripheral sidewall to define a reservoir. A fluid inlet supplies a heat transfer fluid to the reservoir. In one version, a plurality of protrusions extends into the reservoir to perturb the flow of the heat transfer fluid through the reservoir. In another version, the reservoir is an elongated channel having one or more of (i) serpentine convolutions, (ii) integral fins extending into the channel, (iii) a roughened internal surface, or (iv) a changing cross-section. A fluid outlet discharges the heat transfer fluid from the reservoir.

Abstract translation: 用于衬底处理室的支撑件具有通过周边侧壁连接以限定储存器的上壁和下壁。 流体入口将传热流体供应到储存器。 在一个版本中，多个突起延伸到储存器中以扰乱通过储存器的传热流体的流动。 在另一个版本中，储存器是具有（i）蛇形循环中的一个或多个的细长通道，（ii）延伸到通道中的整体翅片，（iii）粗糙化的内表面，或（iv）变化的横截面。 流体出口从储存器排出传热流体。

公开(公告)号：US20030227737A1

公开(公告)日：2003-12-11

申请号：US10454775

申请日：2003-06-03

Applicant: Applied Materials, Inc.

Inventor： Brian C. Lue

IPC: H02H001/00

CPC classification number: H01J37/32559 ,  C23C4/126 ,  C23C30/00 ,  H01L21/68757

Abstract: Various embodiments of the invention are generally directed to an apparatus for supporting a substrate in a processing chamber. In one embodiment, the invention is directed to a chuck made of a dielectric material sintered with binders and a protective layer disposed on the chuck. The protective layer is made from a dielectric material. In another embodiment, the invention is directed to a method for fabricating a chuck. The method includes providing a chuck having an upper surface and a side peripheral surface, introducing dielectric powder particles into a combustible gas mixture, combusting the dielectric powder particles and the gas mixture together, and propelling the combusted powder particles onto the chuck to form a protective layer over at least one of the upper surface and the side peripheral surface of the chuck.

Abstract translation: 本发明的各种实施例通常涉及用于在处理室中支撑衬底的装置。 在一个实施例中，本发明涉及由用粘合剂烧结的电介质材料制成的卡盘以及设置在卡盘上的保护层。 保护层由介电材料制成。 在另一个实施例中，本发明涉及制造卡盘的方法。 该方法包括提供具有上表面和侧周面的卡盘，将电介质粉末颗粒引入可燃气体混合物中，将电介质粉末颗粒和气体混合物一起燃烧，并将燃烧的粉末颗粒推进到卡盘上以形成保护 层叠在卡盘的上表面和侧周面中的至少一个上。