公开(公告)号：US20140079514A1

公开(公告)日：2014-03-20

申请号：US14029307

申请日：2013-09-17

Applicant: Applied Materials, Inc.

Inventor： Alexander S. POLYAK ,  James L'HEUREUX ,  Christopher T. LANE ,  Susanne SCHLAEFER ,  Juergen HENRICH ,  Josef Thomas HOOG ,  Calvin R. AUGASON

IPC: H01L21/677

CPC classification number: H01L21/677 ,  H01L21/67201

Abstract: Methods and apparatus for transferring one or more substrates from a first pressure environment to a second pressure environment is provided. In one embodiment, a load lock chamber is provided. The load lock chamber comprises a first circular housing, and a second circular housing disposed within and movable relative to the first circular housing, one of the first circular housing or the second circular housing comprising a plurality of discrete regions, wherein at least a portion of the plurality of discrete regions are in selective fluid communication with one of at least two vacuum pumps based on the angular position of the second circular housing relative to the first circular housing.

Abstract translation: 提供了将一个或多个基板从第一压力环境转移到第二压力环境的方法和装置。 在一个实施例中，提供了一种加载锁定室。 负载锁定室包括第一圆形壳体和设置在第一圆形壳体内并可相对于第一圆形壳体移动的第二圆形壳体，第一圆形壳体或第二圆形壳体中的一个包括多个离散区域，其中至少一部分 基于第二圆形壳体相对于第一圆形壳体的角位置，多个离散区域与至少两个真空泵中的一个选择性流体连通。