公开(公告)号：US20210172728A1

公开(公告)日：2021-06-10

申请号：US17247241

申请日：2020-12-04

Applicant: Applied Materials, Inc.

Inventor： Mohsin Waqar ,  Paul Zachary Wirth ,  Todd James Brill ,  Paul Edward Fisher ,  Ilias Iliopoulos ,  Charles Gregory Potter, SR.

IPC: G01B11/14 ,  G01B11/06 ,  B25J11/00 ,  H01L21/687

Abstract: Implementations disclosed describe an inspection device capable of being transferred by a robot blade into a processing chamber of a manufacturing machine, the inspection device comprising an optical sensor to detect light reflected from a target located within the processing chamber, wherein the optical sensor is to output, to a processing device, a signal representative of a state of a region of a surface of the target.