公开(公告)号：US11813757B2

公开(公告)日：2023-11-14

申请号：US17069431

申请日：2020-10-13

Applicant: APPLIED MATERIALS, INC.

Inventor： Ali Utku Pehlivan ,  Mohsin Waqar ,  Paul Zachary Wirth ,  Todd James Brill

IPC: B25J9/16

CPC classification number: B25J9/1692

Abstract: A method for finding a center of a process kit and/or a process kit ring is provided. An object placed on an end effector is moved past a sensor of a manufacturing system. A first signal indicating a current shape of object is received from the sensor of the manufacturing system. A determination is made whether the first signal corresponds to a second signal indicating a predefined shape for a process kit and/or a process kit carrier. In response to a determination that the first signal corresponds to the second signal, a coordinate correspondence is determined between coordinates of a center of the object and coordinates of a center of the end effector. The determined coordinate correspondence indicates whether a current placement of the object on the end effector satisfies a target placement criterion.

公开(公告)号：US12215966B2

公开(公告)日：2025-02-04

申请号：US17247241

申请日：2020-12-04

Applicant: Applied Materials, Inc.

Inventor： Mohsin Waqar ,  Paul Zachary Wirth ,  Todd James Brill ,  Paul Edward Fisher ,  Ilias Iliopoulos ,  Charles Gregory Potter, Sr.

IPC: G01B11/14 ,  G01B11/02 ,  G01B11/06 ,  G01B11/24 ,  H01L21/66 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687 ,  B25J11/00

Abstract: Implementations disclosed describe an inspection device capable of being transferred by a robot blade into a processing chamber of a manufacturing machine, the inspection device comprising an optical sensor to detect light reflected from a target located within the processing chamber, wherein the optical sensor is to output, to a processing device, a signal representative of a state of a region of a surface of the target.

公开(公告)号：US20240051144A1

公开(公告)日：2024-02-15

申请号：US18493735

申请日：2023-10-24

Applicant: APPLIED MATERIALS, INC.

Inventor： Ali Utku Pehlivan ,  Mohsin Waqar ,  Paul Zachary Wirth ,  Todd James Brill

IPC: B25J9/16

CPC classification number: B25J9/1692

Abstract: One or more first signals are obtained. The first signals indicate a current shape of an object placed on an end effector. The one or more first signals are compared to one or more second signals that each indicate a predefined shape for a process component on the end effector. A determination is made of whether a current placement of the object on the end effector satisfies a target placement criterion based on the comparison.

公开(公告)号：US20220111529A1

公开(公告)日：2022-04-14

申请号：US17069431

申请日：2020-10-13

Applicant: APPLIED MATERIALS, INC.

Inventor： Ali Utku Pehlivan ,  Mohsin Waqar ,  Paul Zachary Wirth ,  Todd James Brill

IPC: B25J9/16

Abstract: A method for finding a center of a process kit and/or a process kit ring is provided. An object placed on an end effector is moved past a sensor of a manufacturing system. A first signal indicating a current shape of object is received from the sensor of the manufacturing system. A determination is made whether the first signal corresponds to a second signal indicating a predefined shape for a process kit and/or a process kit carrier. In response to a determination that the first signal corresponds to the second signal, a coordinate correspondence is determined between coordinates of a center of the object and coordinates of a center of the end effector. The determined coordinate correspondence indicates whether a current placement of the object on the end effector satisfies a target placement criterion.

公开(公告)号：US20210172728A1

公开(公告)日：2021-06-10

申请号：US17247241

申请日：2020-12-04

Applicant: Applied Materials, Inc.

Inventor： Mohsin Waqar ,  Paul Zachary Wirth ,  Todd James Brill ,  Paul Edward Fisher ,  Ilias Iliopoulos ,  Charles Gregory Potter, SR.

IPC: G01B11/14 ,  G01B11/06 ,  B25J11/00 ,  H01L21/687

Abstract: Implementations disclosed describe an inspection device capable of being transferred by a robot blade into a processing chamber of a manufacturing machine, the inspection device comprising an optical sensor to detect light reflected from a target located within the processing chamber, wherein the optical sensor is to output, to a processing device, a signal representative of a state of a region of a surface of the target.