公开(公告)号：US20220415676A1

公开(公告)日：2022-12-29

申请号：US17362760

申请日：2021-06-29

Applicant: Applied Materials, Inc.

Inventor： Chaitanya Anjaneyalu PRASAD ,  Christopher Sean OLSEN ,  Lara HAWRYLCHAK ,  Erika Gabrielle HANSEN ,  Daniel C. GLOVER ,  Naman APURVA ,  Tsung-Han YANG

IPC: H01L21/67 ,  H01L21/02

Abstract: Embodiments of gas distribution modules for use with rapid thermal processing (RTP) systems and methods of use thereof are provided herein. In some embodiments, a gas distribution module for use with a RTP chamber includes: a first carrier gas line and a first liquid line fluidly coupled to a mixer, the mixer having one or more control valves configured to mix a carrier gas from the first carrier gas line and a liquid from the first liquid line in a desired ratio to form a first mixture; a vaporizer coupled to the mixer and configured to receive the first mixture in a hollow internal volume, the vaporizer having a heater configured to vaporize the first mixture; and a first gas delivery line disposed between the vaporizer and the RTP chamber to deliver the vaporized first mixture to the RTP chamber.