公开(公告)号：US20240102876A1

公开(公告)日：2024-03-28

申请号：US18531478

申请日：2023-12-06

Applicant: Applied Materials, Inc.

Inventor： CHUANG-CHIA LIN ,  DAVID PETERSON ,  PHILIP ALLAN KRAUS ,  AMIR BAYATI

IPC: G01L19/00 ,  H03H9/02 ,  H03H9/145

CPC classification number: G01L19/0092 ,  H03H9/02015 ,  H03H9/02574 ,  H03H9/14502 ,  G01N29/022 ,  G01N2291/014

Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.