公开(公告)号：US20240219337A1

公开(公告)日：2024-07-04

申请号：US18604257

申请日：2024-03-13

Applicant: Applied Materials, Inc.

Inventor： XIAOPU LI ,  KALLOL BERA ,  YAOLING PAN ,  KELVIN CHAN ,  AMIR BAYATI ,  PHILIP ALLAN KRAUS ,  KENRIC T. CHOI ,  WILLIAM JOHN DURAND

IPC: G01N27/22 ,  C23C16/455 ,  C23C16/52 ,  G01N33/00 ,  H01L21/67

CPC classification number: G01N27/22 ,  C23C16/45544 ,  C23C16/45561 ,  C23C16/52 ,  G01N33/0027 ,  H01L21/67017 ,  H01L21/67253

Abstract: Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first electrode. In an embodiment the first electrode comprises first fingers. In an embodiment, the gas concentration sensor further comprises a second electrode. In an embodiment, the second electrode comprises second fingers that are interdigitated with the first fingers.

公开(公告)号：US20240102876A1

公开(公告)日：2024-03-28

申请号：US18531478

申请日：2023-12-06

Applicant: Applied Materials, Inc.

Inventor： CHUANG-CHIA LIN ,  DAVID PETERSON ,  PHILIP ALLAN KRAUS ,  AMIR BAYATI

IPC: G01L19/00 ,  H03H9/02 ,  H03H9/145

CPC classification number: G01L19/0092 ,  H03H9/02015 ,  H03H9/02574 ,  H03H9/14502 ,  G01N29/022 ,  G01N2291/014

Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.

公开(公告)号：US20240035896A1

公开(公告)日：2024-02-01

申请号：US17876392

申请日：2022-07-28

Applicant: Applied Materials, Inc.

Inventor： CHUANG-CHIA LIN ,  MARTIN HILKENE ,  AMIR BAYATI

IPC: G01K7/02 ,  H01L21/67 ,  H01J37/32 ,  G01K11/26

CPC classification number: G01K7/021 ,  H01L21/67248 ,  H01J37/32917 ,  G01K11/265

Abstract: Embodiments disclosed herein include sensor devices. In an embodiment, a sensor device comprises a substrate, a first sensor of a first type on the substrate, where a catalytic layer is provided as at least part of the first sensor, a second sensor of the first type on the substrate and adjacent to the first sensor, and a lid over the substrate, where an opening through the lid is provided over the first sensor and the second sensor.