公开(公告)号：US20240412954A1

公开(公告)日：2024-12-12

申请号：US18208736

申请日：2023-06-12

Applicant: Applied Materials, Inc.

Inventor： Dinkesh HUDERI SOMANNA ,  Dan DEYO ,  Vishwas Kumar PANDEY ,  Ala MORADIAN

IPC: H01J37/32 ,  C23C14/00 ,  C23C14/35 ,  C23C14/50 ,  C23C14/54

Abstract: Embodiments of process chambers having cooling plate are provided herein. In some embodiments, a process chamber includes: a chamber body defining an interior volume therein, the chamber body having a view port side having an opening configured as a view port, a pump side having a pump port, and a shutter side opposite the view port side, wherein the port view side, the pump side, and the shutter side are all different sides of the chamber body; a first cooling plate coupled to the view port side and having one or more first coolant channels; a second cooling plate coupled to the pump side and having one or more second coolant channels; and a third cooling plate coupled to the shutter side and having one or more third coolant channels.