公开(公告)号：US10394130B2

公开(公告)日：2019-08-27

申请号：US15207991

申请日：2016-07-12

Applicant: Applied Materials, Inc.

Inventor： Christopher Dennis Bencher ,  Joseph R. Johnson ,  Dave Markle ,  Mehdi Vaez-Iravani

IPC: G03F7/20 ,  G02B27/28 ,  G02B26/08 ,  G02B5/30 ,  G02F1/13

Abstract: The present disclosure provides a method for producing an image on a substrate. The method includes providing a single beam of light to a multiple DMD assembly, splitting the single beam of light into an s-polarization beam and a p-polarization beam, and reflecting the s-polarization beam and the p-polarization beam through the multiple DMD assembly such that the multiple DMD assembly produces a plurality of superimposed images on the substrate.