公开(公告)号：US20230313380A1

公开(公告)日：2023-10-05

申请号：US18200497

申请日：2023-05-22

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Kenichi OHNO ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  David A. BRITZ ,  Pravin K. NARWANKAR ,  Thomas KNISLEY ,  Mark SALY ,  Jeffrey ANTHIS

IPC: C23C16/56 ,  C22C19/03 ,  C23C16/40

CPC classification number: C23C16/56 ,  C22C19/03 ,  C23C16/405

Abstract: Embodiments of the present disclosure generally relate to protective coatings on aerospace components and methods for depositing the protective coatings. In one or more embodiments, an aerospace component has a body containing a nickel superalloy, a metal oxide template layer disposed on the body, and an aluminum oxide layer disposed between the body of the aerospace component and the metal oxide template layer. The metal oxide template layer contains chromium oxide, chromium oxide hydroxide, or a combination thereof. The aluminum oxide layer contains α-Al2O3. The metal oxide template layer and the aluminum oxide layer have a corundum crystal structure and have crystal structures with a lattice mismatch of about 0.1% to about 10%.

公开(公告)号：US20200340107A1

公开(公告)日：2020-10-29

申请号：US16850856

申请日：2020-04-16

Applicant: Applied Materials, Inc.

Inventor： Sukti CHATTERJEE ,  Lance A. SCUDDER ,  Yuriy MELNIK ,  David A. BRITZ ,  Thomas KNISLEY ,  Kenichi OHNO ,  Pravin K. NARWANKAR

IPC: C23C16/40 ,  C23C16/455 ,  C23C16/56 ,  C23C28/02

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a coating on an aerospace component includes depositing one or more layers on a surface of the aerospace component using an atomic layer deposition or chemical vapor deposition process, and performing a partial oxidation and annealing process to convert the one or more layers to a coalesced layer having a preferred phase crystalline assembly. During oxidation cycles, an aluminum depleted region is formed at the surface of the aerospace component, and an aluminum oxide region is formed between the aluminum depleted region and the coalesced layer. The coalesced layer forms a protective coating, which decreases the rate of aluminum depletion from the aerospace component and the rate of new aluminum oxide scale formation.