公开(公告)号：US09580956B2

公开(公告)日：2017-02-28

申请号：US14146332

申请日：2014-01-02

Applicant: Applied Materials, Inc.

Inventor： Billy C. Leung ,  David E. Berkstresser ,  Shinichi Kurita

IPC: E06B7/232 ,  B65D53/00 ,  H01L21/677

CPC classification number: E06B7/232 ,  B65D53/00 ,  H01L21/67772

Abstract: An apparatus is provided that includes a chamber wall section prone to deflection, a stationary section providing a sealing surface, and a flexible bellows attached to the chamber wall section and the stationary section. A system is also provided that includes a chamber including a chamber wall having an opening, a door disposed to seal the opening, a sealing surface adjacent the opening and isolated from the chamber wall, and a seal between the sealing surface and the chamber wall. Numerous other aspects are provided.

Abstract translation: 提供了一种装置，其包括易于偏转的室壁部分，提供密封表面的固定部分和附接到室壁部分和固定部分的柔性波纹管。 还提供了一种系统，其包括：腔室，其包括具有开口的腔室壁，设置成密封开口的门，邻近开口并与腔壁隔离的密封表面，以及密封表面和腔壁之间的密封。 提供了许多其他方面。

公开(公告)号：US20140111074A1

公开(公告)日：2014-04-24

申请号：US14146332

申请日：2014-01-02

Applicant: Applied Materials, Inc.

Inventor： Billy C. Leung ,  David E. Berkstresser ,  Shinichi Kurita

IPC: E06B7/232

CPC classification number: E06B7/232 ,  B65D53/00 ,  H01L21/67772

Abstract: An apparatus is provided that includes a chamber wall section prone to deflection, a stationary section providing a sealing surface, and a flexible bellows attached to the chamber wall section and the stationary section. A system is also provided that includes a chamber including a chamber wall having an opening, a door disposed to seal the opening, a sealing surface adjacent the opening and isolated from the chamber wall, and a seal between the sealing surface and the chamber wall. Numerous other aspects are provided.

Abstract translation: 提供了一种装置，其包括易于偏转的室壁部分，提供密封表面的固定部分和附接到室壁部分和固定部分的柔性波纹管。 还提供了一种系统，其包括：腔室，其包括具有开口的腔室壁，设置成密封开口的门，邻近开口并与腔壁隔离的密封表面，以及密封表面和腔壁之间的密封。 提供了许多其他方面。