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公开(公告)号：US20240385109A1
公开(公告)日：2024-11-21
申请号：US18197868
申请日：2023-05-16
Applicant: Applied Materials, Inc.
Inventor： Sven Schramm , Martin Hilkene , Elias Martinez , Amir Bayati
IPC: G01N21/3577 , G01N21/25
Abstract: Embodiments disclosed herein include a moisture detection module. In an embodiment, the moisture detection module comprises an optical bandpass filter configured to be optically coupled to a light source, where a passband is centered at 309 nm. In an embodiment, the moisture detection module further comprises a detector optically coupled to the optical bandpass filter.
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