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公开(公告)号：US12216015B2
公开(公告)日：2025-02-04
申请号：US18531478
申请日：2023-12-06
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , David Peterson , Philip Allan Kraus , Amir Bayati
Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.
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公开(公告)号：US12228534B2
公开(公告)日：2025-02-18
申请号：US18604257
申请日：2024-03-13
Applicant: Applied Materials, Inc.
Inventor： Xiaopu Li , Kallol Bera , Yaoling Pan , Kelvin Chan , Amir Bayati , Philip Allan Kraus , Kenric T. Choi , William John Durand
Abstract: Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first electrode. In an embodiment the first electrode comprises first fingers. In an embodiment, the gas concentration sensor further comprises a second electrode. In an embodiment, the second electrode comprises second fingers that are interdigitated with the first fingers.
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公开(公告)号：US20220244205A1
公开(公告)日：2022-08-04
申请号：US17166967
申请日：2021-02-03
Applicant: Applied Materials, Inc.
Inventor： Xiaopu Li , Kallol Bera , Yaoling Pan , Kelvin Chan , Amir Bayati , Philip Allan Kraus , Kenric T. Choi , William John Durand
IPC: G01N27/22 , H01L21/67 , C23C16/455 , C23C16/52 , G01N33/00
Abstract: Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first electrode. In an embodiment the first electrode comprises first fingers. In an embodiment, the gas concentration sensor further comprises a second electrode. In an embodiment, the second electrode comprises second fingers that are interdigitated with the first fingers.
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Patent Agency Ranking
公开(公告)号：US20250043423A1
公开(公告)日：2025-02-06
申请号：US18228549
申请日：2023-07-31
Applicant: Applied Materials, Inc.
Inventor： William Durand , Abdullah Zafar , Usman Chowdhury , Amir Bayati , Farzad Houshmand , David J. Coumou , Kasturi Sarang , Kenric Choi
IPC: C23C16/455 , G01N21/3504
Abstract: Vapor concentration sensors for deposition process or deposition chamber condition monitoring are described. In an example, a deposition system includes a deposition chamber, a deposition precursor source coupled to an inlet of the deposition chamber, and a non-dispersive infrared (NDIR) vapor concentration sensor between the deposition precursor source and the deposition chamber.
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公开(公告)号：US20240385109A1
公开(公告)日：2024-11-21
申请号：US18197868
申请日：2023-05-16
Applicant: Applied Materials, Inc.
Inventor： Sven Schramm , Martin Hilkene , Elias Martinez , Amir Bayati
IPC: G01N21/3577 , G01N21/25
Abstract: Embodiments disclosed herein include a moisture detection module. In an embodiment, the moisture detection module comprises an optical bandpass filter configured to be optically coupled to a light source, where a passband is centered at 309 nm. In an embodiment, the moisture detection module further comprises a detector optically coupled to the optical bandpass filter.
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公开(公告)号：US11959868B2
公开(公告)日：2024-04-16
申请号：US17166967
申请日：2021-02-03
Applicant: Applied Materials, Inc.
Inventor： Xiaopu Li , Kallol Bera , Yaoling Pan , Kelvin Chan , Amir Bayati , Philip Allan Kraus , Kenric T. Choi , William John Durand
CPC classification number: G01N27/22 , C23C16/45544 , C23C16/45561 , C23C16/52 , G01N33/0027 , H01L21/67017 , H01L21/67253
Abstract: Embodiments disclosed herein include gas concentration sensors, and methods of using such gas concentration sensors. In an embodiment, a gas concentration sensor comprises a first electrode. In an embodiment the first electrode comprises first fingers. In an embodiment, the gas concentration sensor further comprises a second electrode. In an embodiment, the second electrode comprises second fingers that are interdigitated with the first fingers.
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公开(公告)号：US11874189B2
公开(公告)日：2024-01-16
申请号：US17367250
申请日：2021-07-02
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , David Peterson , Philip Allan Kraus , Amir Bayati
CPC classification number: G01L19/0092 , H03H9/02015 , H03H9/02574 , H03H9/14502 , G01N29/022 , G01N2291/014
Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.
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公开(公告)号：US20230003598A1
公开(公告)日：2023-01-05
申请号：US17367250
申请日：2021-07-02
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , David Peterson , Philip Allan Kraus , Amir Bayati
Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.
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