公开(公告)号：US20200217423A1

公开(公告)日：2020-07-09

申请号：US16642827

申请日：2018-09-28

Applicant: Applied Materials, Inc.

Inventor： Benjamin B. RIORDON ,  Charles T. CARLSON ,  Aaron WEBB ,  Gary WYKA

IPC: F16K1/20 ,  F16K49/00 ,  F16K51/02 ,  H01J37/32

Abstract: The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.