公开(公告)号：US20220016628A1

公开(公告)日：2022-01-20

申请号：US16933597

申请日：2020-07-20

Applicant: Applied Materials, Inc.

Inventor： Ryan Scott SMITH ,  Roger QUON ,  David COLLINS ,  George ODLUM ,  Raghav SREENIVASAN ,  Joseph R. JOHNSON

IPC: B01L3/00 ,  B82B1/00 ,  B82B3/00 ,  G01N27/447 ,  G01N27/40 ,  G01N33/487

Abstract: Embodiments of the present disclosure provide nanopore devices, such as nanopore sensors and/or other nanofluidic devices. In one or more embodiments, a nanopore device contains a substrate, an optional lower protective oxide layer disposed on the substrate, a membrane disposed on the lower protective oxide layer, and an optional upper protective oxide layer disposed on the membrane. The membrane has a pore and contains silicon nitride. The silicon nitride has a nitrogen to silicon ratio of about 0.98 to about 1.02 and the membrane has an intrinsic stress value of about −1,000 MPa to about 1,000 MPa. The nanopore device also contains a channel extending through at least the substrate, the lower protective oxide layer, the membrane, the upper protective oxide layer, and the upper protective silicon nitride layer.