公开(公告)号：US20240371602A1

公开(公告)日：2024-11-07

申请号：US18143666

申请日：2023-05-05

Applicant: Applied Materials, Inc.

Inventor： Frank Sinclair ,  Paul Joseph Murphy ,  Bon-Woong Koo ,  Gregory Edward Stratoti ,  Tseh-Jen Hsieh ,  Alexandre Likhanskii ,  Glenn Green

IPC: H01J37/317 ,  H01J37/08 ,  H01J37/147

Abstract: An ion implanter that includes an ion source to generate an ion beam, a platen disposed in a process chamber to support a workpiece that is treated with the ion beam, and a plasma flood gun that results in fewer particles in the process chamber is disclosed. The plasma flood gun includes at least one plasma chamber, each having at least one aperture through which low energy ions and electrons are emitted. A sweeper is located near the aperture, positioned so as to be between the aperture and the upstream components. The sweeper is heated using resistive elements or a halogen lamp so as to elevate its temperature, which limited the amount of deposition that occurs on the sweeper.

公开(公告)号：US20240249908A1

公开(公告)日：2024-07-25

申请号：US18101260

申请日：2023-01-25

Applicant: Applied Materials, Inc.

Inventor： Frank Sinclair ,  Paul Joseph Murphy ,  Bon-Woong Koo ,  Gregory Edward Stratoti ,  Tseh-Jen Hsieh ,  Glenn Green

IPC: H01J37/244 ,  C23C14/48 ,  H01J37/09 ,  H01J37/317

CPC classification number: H01J37/244 ,  C23C14/48 ,  H01J37/09 ,  H01J37/3171 ,  H01J2237/0453 ,  H01J2237/24564

Abstract: A dose cup assembly that results in less particles in a process chamber is disclosed. The dose cup assembly includes a faceplate attached to a back wall of the process chamber, and having an opening; an aperture plate defining a plurality of slots; and a tunnel having walls and sidewalls and having a proximal end and a distal end, located between the faceplate and the aperture plate, such that the proximal end is nearer to the faceplate and the distal end is nearer to the aperture plate; wherein at least one of the faceplate, the walls, the sidewalls or the aperture plate has one or more exposed outer surfaces that comprise silicon. The exposed outer surfaces may be silicon. In some embodiments, the faceplate, the walls, the sidewalls or the aperture plate may be graphite, aluminum, or stainless steel which is coated with silicon or silicon carbide.