公开(公告)号：US20230239970A1

公开(公告)日：2023-07-27

申请号：US17583755

申请日：2022-01-25

Applicant: Applied Materials, Inc.

Inventor： Dursun Moore ,  Julian G. Blake ,  Hillman Bailey ,  James D. Strassner ,  Paul Forderhase

IPC: H05B3/00 ,  H05B3/44 ,  H01J37/317

CPC classification number: H05B3/0033 ,  H05B3/44 ,  H01J37/3171 ,  H01J2237/31701 ,  H01J2237/002

Abstract: A heater assembly that that is effective at maintaining heating lamps at acceptable temperatures is disclosed. The heater assembly utilizes radiative heat transfer to transfer unwanted heat buildup in the heating lamps to a cooling base. One or more high emissivity films are disposed between the heating lamps and the cooling base to facilitate heat transfer. Further, a reflective coating is applied to a portion of the heating lamps to reflect heat away from the cooling base. The heater assembly may be utilized in a high vacuum environment as it does not rely on convective cooling.