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    Actively clamped carrier assembly for processing tools
    1.
    发明授权
    Actively clamped carrier assembly for processing tools 有权

    公开(公告)号：US12191186B2

    公开(公告)日：2025-01-07

    申请号：US18338443

    申请日：2023-06-21

    Applicant: Applied Materials, Inc.

    Inventor： Benjamin B. Riordon ,  James D. Strassner

    IPC: H01L21/683 ,  B05C21/00 ,  C23C14/04 ,  C23C16/04 ,  C23C16/458 ,  H01L21/02 ,  H01L21/687

    Abstract: Embodiments of the present disclosure are related to carrier assemblies that can clamp more than one optical device substrates and methods for forming the carrier assemblies. The carrier assembly includes a carrier, one or more substrates, and a mask. The carrier is magnetically coupled to the mask to retain the one or more substrates. The carrier assembly is used for supporting and transporting the one or more substrates during processing. The carrier assembly is also used for masking the one or more substrates during PVD processing. Methods for assembling the carrier assembly in a build chamber are described herein.

    Minimal contact gripping of thin optical devices
    2.
    发明授权
    Minimal contact gripping of thin optical devices 有权

    公开(公告)号：US11975422B2

    公开(公告)日：2024-05-07

    申请号：US18061327

    申请日：2022-12-02

    Applicant: Applied Materials, Inc.

    Inventor： Yaseer Arafath Ahamed ,  Kangkang Wang ,  Benjamin B. Riordon ,  James D. Strassner ,  Ludovic Godet

    IPC: B25B11/00 ,  G02B1/00 ,  G02B6/10

    CPC classification number: B25B11/005 ,  G02B1/002 ,  G02B6/10

    Abstract: Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.

    Aligner apparatus and methods
    5.
    发明授权
    Aligner apparatus and methods 有权

    公开(公告)号：US10522381B2

    公开(公告)日：2019-12-31

    申请号：US15481679

    申请日：2017-04-07

    Applicant: Applied Materials, Inc.

    Inventor： Yaseer Arafath Ahamed ,  James D. Strassner

    IPC: B25B5/14 ,  H01L21/68 ,  H01L21/687

    Abstract: Described herein are aligners and methods of aligning workpieces. A workpiece aligner apparatus comprises an aligner chuck including an arm having a first end and a second end, a first edge gripping element on the first end and a second edge gripping element on the second end, the first edge gripping element and the second edge gripping element spaced apart to hold a workpiece at edges thereof, and a central workpiece handling element located in a central region of the arm, wherein the central workpiece handling element has a height such that the central workpiece handling element extends higher than the first edge gripping element and second edge gripping element.

    Aligner Apparatus And Methods
    6.
    发明申请
    Aligner Apparatus And Methods 审中-公开

    公开(公告)号：US20180294175A1

    公开(公告)日：2018-10-11

    申请号：US15481679

    申请日：2017-04-07

    Applicant: Applied Materials, Inc.

    Inventor： Yaseer Arafath Ahamed ,  James D. Strassner

    IPC: H01L21/68 ,  C23C14/04 ,  C23C14/50 ,  H01L21/687

    Abstract: Described herein are aligners and methods of aligning workpieces. A workpiece aligner apparatus comprises an aligner chuck including an arm having a first end and a second end, a first edge gripping element on the first end and a second edge gripping element on the second end, the first edge gripping element and the second edge gripping element spaced apart to hold a workpiece at edges thereof, and a central workpiece handling element located in a central region of the arm, wherein the central workpiece handling element has a height such that the central workpiece handling element extends higher than the first edge gripping element and second edge gripping element.

    PASSIVE SEPARATION CASSETTE AND CARRIER
    8.
    发明公开
    PASSIVE SEPARATION CASSETTE AND CARRIER 审中-公开

    公开(公告)号：US20240186166A1

    公开(公告)日：2024-06-06

    申请号：US18073229

    申请日：2022-12-01

    Applicant: Applied Materials, Inc.

    Inventor： James B. Exley ,  Ross Bandy ,  James D. Strassner

    IPC: H01L21/677 ,  H01L21/687

    CPC classification number: H01L21/67742 ,  H01L21/67754 ,  H01L21/68707

    Abstract: A system for holding and transporting one or more workpieces is disclosed. The system includes a cassette that is configured to support a carrier and a workpiece at two different elevations. In this way, as the carrier with the workpiece is placed on the cassette by a first robot, the carrier moves down further, as the workpiece is supported by taller support posts. The end effector of a second robot may then later remove only the workpiece from the cassette for processing. The processed workpiece is later placed back in the cassette by the second robot. This processed workpiece is then removed, along with the carrier, by the first robot. Carriers may be created to accommodate different sized workpieces such that the cassette remains unchanged.

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