公开(公告)号：US11693435B2

公开(公告)日：2023-07-04

申请号：US17356287

申请日：2021-06-23

Applicant: Applied Materials, Inc.

Inventor： Ricardo Martinez ,  Hung Xuan Hoang ,  Dmitry Sklyar ,  Farooq Aleem ,  Jagan Rangarajan ,  William Wadsworth ,  Brett Hoogensen

IPC: G05D7/06 ,  G05B19/042

CPC classification number: G05D7/0676 ,  G05B19/042 ,  G05B2219/45096

Abstract: In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.

公开(公告)号：US20210405665A1

公开(公告)日：2021-12-30

申请号：US17356287

申请日：2021-06-23

Applicant: Applied Materials, Inc.

Inventor： Ricardo Martinez ,  Hung Xuan Hoang ,  Dmitry Sklyar ,  Farooq Aleem ,  Jagan Rangarajan ,  William Wadsworth ,  Brett Hoogensen

IPC: G05D7/06 ,  G05B19/042

Abstract: In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.