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    PLASMA PROCESSING APPARATUS
    1.
    发明公开
    PLASMA PROCESSING APPARATUS 审中-公开

    公开(公告)号：US20240321559A1

    公开(公告)日：2024-09-26

    申请号：US18609340

    申请日：2024-03-19

    申请人： Tokyo Electron Limited

    发明人： Satoshi TAGA

    IPC分类号： H01J37/32 ,  G05D7/06 ,  G05D9/12

    CPC分类号： H01J37/32522 ,  G05D7/0676 ,  G05D9/12 ,  H01J2237/002

    摘要： A technique for reducing a pressure at which a heat transfer medium is supplied to a flow path is provided. In an exemplary embodiment, a plasma processing apparatus is provided. The plasma processing apparatus includes a chamber, a plasma generator, a temperature adjustment target, and a supply. The supply supplies a heat transfer medium to the flow path and includes a first tank, a second tank, a pump, and a heat exchanger. The first tank stores the heat transfer medium and is connected to the flow path via a first pipe. The second tank stores the heat transfer medium, is connected to the flow path via a second pipe, and is connected to the first tank via a third pipe. The second tank is disposed at a position lower than a position of the first tank.

    SYSTEM, METHOD, AND VALVE ASSEMBLY FOR SURGE PROTECTION
    3.
    发明公开
    SYSTEM, METHOD, AND VALVE ASSEMBLY FOR SURGE PROTECTION 审中-公开

    公开(公告)号：US20240255070A1

    公开(公告)日：2024-08-01

    申请号：US18161202

    申请日：2023-01-30

    申请人： THE BOEING COMPANY

    发明人： Mohamed Elbibary ,  Hosam E. El-Gabalawy

    IPC分类号： F16K37/00 ,  G01L23/00 ,  G05D7/06

    CPC分类号： F16K37/0066 ,  G01L23/00 ,  G05D7/0676

    摘要： A surge control system and method include a valve assembly located along a fluid conduit downstream of one or more compressors in a flow circuit, and configured to receive a fluid stream from the one or more compressors. The valve assembly includes a valve body, a pitot tube integrated onto the valve body, and a pressure sensor device operably connected to the pitot tube. A controller of the surge control system receives pressure measurements generated by the pressure sensor device. The pressure measurements represent pressure in the pitot tube over time. The controller analyzes at least one of (i) the pressure measurements or (ii) flow velocity values derived from the pressure measurements, and detects a surge condition in the flow circuit based on oscillations in the at least one of the pressure measurements or the flow velocity values.

    FLUID DISPENSING SYSTEM
    5.
    发明公开
    FLUID DISPENSING SYSTEM 审中-公开

    公开(公告)号：US20240184314A1

    公开(公告)日：2024-06-06

    申请号：US18522994

    申请日：2023-11-29

    申请人： Starbucks Corporation

    发明人： Jonathan Levey

    IPC分类号： G05D7/06 ,  A23F3/40 ,  A23F5/46 ,  A47J31/46

    CPC分类号： G05D7/0676 ,  A23F3/405 ,  A23F5/465 ,  A47J31/468

    摘要： Disclosed herein are methods of pumping fluids and fluid pump devices and systems. The systems described herein include an adjustable pump configured to expel fluid at a plurality of flow rates. The systems include at least one current measurement device communicatively coupled to the pump and configured to measure an electrical current applied to the pump. The systems include a controller communicatively coupled to the pump and the at least one current measurement device. The controller is configured to adjust an operating parameter of the pump based at least in part on a measurement of the electrical current measured by the at least one current measurement device.

    Differential pressure liquid flow controller
    6.
    发明授权
    Differential pressure liquid flow controller 有权

    公开(公告)号：US11994885B2

    公开(公告)日：2024-05-28

    申请号：US17819508

    申请日：2022-08-12

    申请人： TSI Incorporated

    发明人： Lin Li

    IPC分类号： G05D7/06

    CPC分类号： G05D7/0623 ,  G05D7/0635 ,  G05D7/0676 ,  Y10T137/7761

    摘要： A fluid system includes a capillary and a first and second temperature sensor, a first and second pressure sensor, and a processor coupled to the sensors. The processor is configured to execute instructions to determine an output using the sensor data and using fluid parameter data received via an interface coupled to the processor. The processor is coupled to a control in fluid communication with the capillary.