公开(公告)号：US20240344608A1

公开(公告)日：2024-10-17

申请号：US18209762

申请日：2023-06-14

Applicant: Applied Materials, Inc.

Inventor： Shashidhara Patel H B ,  Nagaraj Naik ,  Muhannad Mustafa ,  Bin Cao ,  Sanjeev Baluja ,  Aditya Chuttar ,  Jae Hwa Park

IPC: F16J15/00 ,  F16J15/02

CPC classification number: F16J15/002 ,  F16J15/024

Abstract: Sealing bodies comprising a first body having a top surface and a bottom surface defining a thickness thereof. An inlet conduit and an outlet conduit are in fluid communication with one or more of the top surface, the bottom surface, or a top channel formed in the top surface or a bottom channel formed in the bottom surface.