公开(公告)号：US20240186166A1

公开(公告)日：2024-06-06

申请号：US18073229

申请日：2022-12-01

Applicant: Applied Materials, Inc.

Inventor： James B. Exley ,  Ross Bandy ,  James D. Strassner

IPC: H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67742 ,  H01L21/67754 ,  H01L21/68707

Abstract: A system for holding and transporting one or more workpieces is disclosed. The system includes a cassette that is configured to support a carrier and a workpiece at two different elevations. In this way, as the carrier with the workpiece is placed on the cassette by a first robot, the carrier moves down further, as the workpiece is supported by taller support posts. The end effector of a second robot may then later remove only the workpiece from the cassette for processing. The processed workpiece is later placed back in the cassette by the second robot. This processed workpiece is then removed, along with the carrier, by the first robot. Carriers may be created to accommodate different sized workpieces such that the cassette remains unchanged.